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  2. Telecentric VS-TCM1-65CO/S-RIR (Hikari Alphax Co., Ltd.)
Telecentric VS-TCM1-65CO/S-RIR-VS-TCM1-65CO/S-RIR
Telecentric VS-TCM1-65CO/S-RIR-Hikari Alphax Co., Ltd.

Telecentric VS-TCM1-65CO/S-RIR
Hikari Alphax Co., Ltd.

Hikari Alphax Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

9.9hours

Fast Response

About This Product

Product specs

■Near-infrared focus shift correction

・Focus shift is corrected within the wavelength range from visible light to 1,200 nm, allowing you to switch between surface inspection and transmission inspection simply by changing the wavelength of the illumination. ・Optical magnification 1.0x ・Lens with increased transmittance of 600nm and 1,200nm

■Image example: Wafer pattern

With VS-TCM1-65CO/S-RIR, different inspections can be performed simply by changing the illumination wavelength. Furthermore, even if the wavelength is changed, images can be taken while remaining in focus. Illumination wavelength change x focus shift correction

■Image taken by changing the wavelength of backlight illumination

Alignment marks can be clearly visualized

■Image taken by changing the wavelength of spot illumination

Surface defects can be clearly visualized

  • Product

    Telecentric VS-TCM1-65CO/S-RIR

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1 Models of Telecentric VS-TCM1-65CO/S-RIR

Image Part Number Price (excluding tax)
Telecentric VS-TCM1-65CO/S-RIR-Part Number-VS-TCM1-65CO/S-RIR

VS-TCM1-65CO/S-RIR

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About Company Handling This Product

Hikari Alphax Co., Ltd.

Response Rate

100.0%

Response Time

9.9hrs

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