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  2. Filter Siloxane Ozone Remover SFX Series (Hatashige Shoten Co., Ltd.)
Filter Siloxane Ozone Remover SFX Series-SFX40-8
Filter Siloxane Ozone Remover SFX Series-Hatashige Shoten Co., Ltd.

Filter Siloxane Ozone Remover SFX Series
Hatashige Shoten Co., Ltd.

Hatashige Shoten Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

12.3hours

Relatively Fast Response

About This Product

A remover that specializes in siloxane adsorption and ozone decomposition. With a high removal rate of 99%, compressed air/nitrogen gas can be used at a high flow rate while still being pressurized.

■Industry

・Semiconductor manufacturing process (post-process) ·implementation

■Removal of two types of pollutants

Adopts activated carbon element to remove siloxane or ozone.

■High pressure compatible

Compressed air and nitrogen gas can be used in a pressurized state.

■High removal rate

Siloxane adsorption performance and ozone decomposition performance of 99% or more.

■Space saving

The module can be connected to our refining equipment to save piping.

  • Product

    Filter Siloxane Ozone Remover SFX Series

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1 Models of Filter Siloxane Ozone Remover SFX Series

Image Part Number Price (excluding tax) Removal rate % Mass kg Pressure resistance MPa Concentration range Maximum working pressure MPa Maximum processing flow rate L/min (ANR) Target removal substance Ambient temperature/Fluid temperature ℃ Fluid used Element replacement
Filter Siloxane Ozone Remover SFX Series-Part Number-SFX40-8

SFX40-8

Available upon quote

Siloxane (D4, D5): 99 or more
Ozone: 99 or more

0.8

1.5

Siloxane (D4, D5): 0.005~1,500μg/L
Ozone: 0.5ppm or less

1

Siloxane (D4, D5): 700
Ozone: 560

Siloxane (D4, D5)
ozone

5~50

Compressed air cleanliness grade 1:6:1 (ISO8573-1:2010), nitrogen gas

1 year or pressure drop 0.1MPa

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About Company Handling This Product

Hatashige Shoten Co., Ltd.

Response Rate

100.0%

Response Time

12.3hrs

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