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  4. Fully automatic coating equipment resin paste coater (Engineering Lab Co., Ltd.)
Fully automatic coating equipment resin paste coater-WL
Fully automatic coating equipment resin paste coater-Engineering Lab Co., Ltd.

Fully automatic coating equipment resin paste coater
Engineering Lab Co., Ltd.

About This Product

The resin paste coater is a fully automatic coating device developed for the semiconductor industry. The WL is equipped with a twin-air dispenser and can uniformly coat polyimide and resist by performing spiral coating on the wafer. Compared to conventional spin coaters, the amount of liquid used can be significantly reduced, contributing to carbon neutrality. It can accommodate 6 to 12 inch wafers. CL uses a twin air dispenser to finely apply polyimide, resist, silver paste, etc. at a thickness of approximately 50 to 100 um for the purpose of patterning dots or lines on chips mounted on a tray or forming dam structures. . The resin/paste coater is equipped as standard with specifications suitable for the semiconductor industry, such as clean room specifications, FFU, and wafer-compatible suction stages, and can also meet the needs of wafer transportation such as conveyors and loaders.

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    Fully automatic coating equipment resin paste coater

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1 Models of Fully automatic coating equipment resin paste coater

Image Part Number Price (excluding tax) Weight Device size Image software features Inspection unit Equipped with dispenser Transport system Compatible substrates Utility Cooling plate Oven XY stage drive
Fully automatic coating equipment resin paste coater-Part Number-WL

WL

Available upon quote

2,200kg

W2,300 x D1,800x H2,000mm

Auto alignment, DXF import function

None

Twin air dispenser

Loader

6~12 inch wafer

AC200V, clean dry air: 0.5Mpa, vacuum

Available

Available

Ball screw or linear motor

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About Company Handling This Product

Engineering Lab Co., Ltd.

  • Japan

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