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  4. Measuring Instruments/Measuring Systems Ellipsometer (HiSOL,Inc.)
Measuring Instruments/Measuring Systems Ellipsometer-Measuring Instruments/Measuring Systems Ellipsometer
Measuring Instruments/Measuring Systems Ellipsometer-HiSOL,Inc.

Measuring Instruments/Measuring Systems Ellipsometer
HiSOL,Inc.

HiSOL,Inc.'s Response Status

Response Rate

100.0%

Response Time

40.5hours

About This Product

■Automatic polarization analyzer World's smallest ellipsometer

An ellipsometer irradiates a sample with light and measures the changes in the polarization state of the light reflected from the sample to determine the optical constants such as the thickness, refractive index and absorption coefficient of a thin film, or the optical constants of a bulk material. This is a device for analysis. It is used in various fields to perform non-contact, non-destructive and highly accurate measurements.

■Fixed angle of incidence

Usually fixed at 70 degrees.

■Manual variable incidence angle

It can be manually adjusted to 50, 60, 70, and 80 degrees.

■Incidence angle automatically variable

・Can be set from 45 to 90 degrees in 0.01 degree steps. - Measurement can be performed automatically for up to 5 incidences.

■Fixed sample stage

・This is a stage for measuring one point on a sample. ・With manual tilt and manual height adjustment device

■Manual sample stage

・Determine the measurement location using the manual θ-Y stage. ・Manual θ-axis stroke: 360 degrees, no scale ・Manual Y-axis stroke: 75mm micrometer ・Head can be attached

■Automatic sample stage

・Automatic multi-point measurement is possible with the automatic θ-Y stage. - Mapping measurement is also possible, and the results can be displayed in a 3D bird's-eye view. ・Automatic θ-axis Stroke: 360 degrees Resolution: 0.1 degrees ・Automatic Y-axis Stroke: 75mm Resolution: 0.1mm

  • Product

    Measuring Instruments/Measuring Systems Ellipsometer

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1 Models of Measuring Instruments/Measuring Systems Ellipsometer

Image Part Number Price (excluding tax) Measurement accuracy Measurement time Measurement method Size Angle of incidence Light source Beam diameter Sample stage Control station
Measuring Instruments/Measuring Systems Ellipsometer-Part Number-Measuring Instruments/Measuring Systems Ellipsometer

Measuring Instruments/Measuring Systems Ellipsometer

Available upon quote

△/±0.01°ψ/±0.01° [However, when measuring SiO2 (1000Å) /Si]

Min0.05 seconds (usually 2 seconds)

Rotating retarder method (RQ method)

300×400×450 (main body)

Fixed (usually 70 degrees)

0.8mw He-Ne laser (λ/632.8nm)

0.8mmФ

Automatic θ-Y stage, standard up to Ф160mm (full automatic measurement possible), motor drive Z axis, manual tilt mechanism included

Dos/V PC

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About Company Handling This Product

HiSOL,Inc.

Response Rate

100.0%

Response Time

40.5hrs

Company Overview

Hisol Inc., established in 1967 as Kan Electronics, is a manufacturer based in Tokyo, Japan, producing machine...

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  • Japan

Related search keywords

Ellipsometers
Ellipsometers　HiSOL,Inc.
HiSOL,Inc.

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