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  4. Low-cost vibration monitor that logs displacement data of vibration isolation table over a long period of time Semiconductor manufacturing equipment vibration monitor (PERITEC INC.)
Low-cost vibration monitor that logs displacement data of vibration isolation table over a long period of time Semiconductor manufacturing equipment vibration monitor-Semiconductor manufacturing equipment vibration monitor
Low-cost vibration monitor that logs displacement data of vibration isolation table over a long period of time Semiconductor manufacturing equipment vibration monitor-PERITEC INC.

Low-cost vibration monitor that logs displacement data of vibration isolation table over a long period of time Semiconductor manufacturing equipment vibration monitor
PERITEC INC.

About This Product

We install displacement meters and accelerometers on a vibration isolation table to continuously record vibrations that cause defects on semiconductor manufacturing lines over long periods of time at a maximum of 10Hz. The acquired data can be displayed on the screen as it is, analyzed as a frequency and displayed as a graph, or output as a CSV file every hour. There is an option to analyze and display the data saved by this system.

■Features (main specifications)

・Number of acquisition channels: 15ch (displacement 6ch, acceleration 9ch) ・Acquired data monitor display ・Automatically save CSV file (automatically split into 1 hour units) ・Sampling frequency 10~0.1Hz ・Frequency-power density graph display by FFT analysis

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    Low-cost vibration monitor that logs displacement data of vibration isolation table over a long period of time Semiconductor manufacturing equipment vibration monitor

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1 Models of Low-cost vibration monitor that logs displacement data of vibration isolation table over a long period of time Semiconductor manufacturing equipment vibration monitor

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Low-cost vibration monitor that logs displacement data of vibration isolation table over a long period of time Semiconductor manufacturing equipment vibration monitor-Part Number-Semiconductor manufacturing equipment vibration monitor

Semiconductor manufacturing equipment vibration monitor

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PERITEC INC.

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Vibration Analysis Software　PERITEC INC.
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