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  1. Metoree
  2. Heat Sources
  3. Plate Heaters
  4. Film heating wafer hot chuck/PH101, 201, 301, 050 series (MSA Factory Co., Ltd.)
Film heating wafer hot chuck/PH101, 201, 301, 050 series-PH050
Film heating wafer hot chuck/PH101, 201, 301, 050 series-PH070
Film heating wafer hot chuck/PH101, 201, 301, 050 series-PH101
Film heating wafer hot chuck/PH101, 201, 301, 050 series-PH101-TIN
Film heating wafer hot chuck/PH101, 201, 301, 050 series-PH201-O
Film heating wafer hot chuck/PH101, 201, 301, 050 series-PH201-C
Film heating wafer hot chuck/PH101, 201, 301, 050 series-PH302
Film heating wafer hot chuck/PH101, 201, 301, 050 series-MSA Factory Co., Ltd.

Film heating wafer hot chuck/PH101, 201, 301, 050 series
MSA Factory Co., Ltd.

MSA Factory Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

149.2hours

About This Product

■Main uses

Temperature characteristics test for wafers, hot chuck glass chuck for probe mounting, electrical characteristics test of substrates

■Digital temperature controller

Connects to MSA factory standard temperature controller with one-touch connector. Highly accurate temperature control can be performed immediately with simple operations.

■Customization of chuck pattern available

Standard suction pattern: If you place the workpiece in the center suction hole, the size is universal (for example, if the chuck has a 6” specification, it can be used with any size below 6”, including 6”, 4”, and 3”). We can customize the chuck pattern (such as specifying the suction position) if there is a specified chuck pattern.

■Chuck surface (conductivity/insulation/leakage)

The chuck surface is available in conductive specifications such as gold plating (up to 200℃) and nickel plating (up to 400℃), as well as insulating specifications such as alumite treatment (400℃) and alumina coating. The chuck surface has a GND terminal, so it can be connected to the GND of a measuring instrument, etc.

  • Product

    Film heating wafer hot chuck/PH101, 201, 301, 050 series

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Last viewed: 13 hours ago

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8 Models of Film heating wafer hot chuck/PH101, 201, 301, 050 series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Power supply voltage Compatible temperature controller Surface treatment Features Maximum temperature Plate material Plate size
Film heating wafer hot chuck/PH101, 201, 301, 050 series-Part Number-PH050

PH050

Available upon quote

AC100V

PCC100G, PCC107

Black alumite treatment

Smallest size hot chuck,
With laser marking marker

300℃

Aluminum alloy

30×40mm

Film heating wafer hot chuck/PH101, 201, 301, 050 series-Part Number-PH070

PH070

Available upon quote

AC100V

PCC100G, PCC107

Black alumite treatment

Laser marking
with marker

300℃

Aluminum alloy

70×70mm

Film heating wafer hot chuck/PH101, 201, 301, 050 series-Part Number-PH101

PH101

Available upon quote

AC100V

PCC100G, PCC107

Black alumite treatment

-

200℃

Aluminum alloy

100×100mm

Film heating wafer hot chuck/PH101, 201, 301, 050 series-Part Number-PH101-TIN

PH101-TIN

Available upon quote

AC100V

PCC100G, PCC107

SiO vapor deposited film

SiO vapor deposition film treatment

300℃

Aluminum alloy

100×100mm

Film heating wafer hot chuck/PH101, 201, 301, 050 series-Part Number-PH201-O

PH201-O

Available upon quote

AC100V

PCC100G, PCC107

Black alumite treatment

Mechanical clamp
vacuum chuck

200℃

Aluminum alloy

4~6”

Film heating wafer hot chuck/PH101, 201, 301, 050 series-Part Number-PH201-C

PH201-C

Available upon quote

AC100V

PCC100G, PCC107

Gold plating treatment

Gold plating treatment, hot plate insulation treatment,
Air cooling (using compressed air) function

200, 400℃

Aluminum alloy

70×70mm

Film heating wafer hot chuck/PH101, 201, 301, 050 series-Part Number-PH302

PH302

Available upon quote

AC100V

PCC100G, PCC107

Black alumite treatment

-

200℃

Aluminum alloy

250×250mm

Film heating wafer hot chuck/PH101, 201, 301, 050 series-Part Number-PH101-T

PH101-T

Available upon quote

AC100V

PCC100G, PCC107

Gold plating treatment

With mechanical clamp function,
Gold plating treatment, hot plate insulation treatment

300℃

Aluminum alloy

4

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About Company Handling This Product

MSA Factory Co., Ltd.

Response Rate

100.0%

Response Time

149.2hrs

  • Japan

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