Film heating wafer hot chuck/PH101, 201, 301, 050 series
MSA Factory Co., Ltd.
About This Product
■Main uses
Temperature characteristics test for wafers, hot chuck glass chuck for probe mounting, electrical characteristics test of substrates
■Digital temperature controller
Connects to MSA factory standard temperature controller with one-touch connector. Highly accurate temperature control can be performed immediately with simple operations.
■Customization of chuck pattern available
Standard suction pattern: If you place the workpiece in the center suction hole, the size is universal (for example, if the chuck has a 6” specification, it can be used with any size below 6”, including 6”, 4”, and 3”). We can customize the chuck pattern (such as specifying the suction position) if there is a specified chuck pattern.
■Chuck surface (conductivity/insulation/leakage)
The chuck surface is available in conductive specifications such as gold plating (up to 200℃) and nickel plating (up to 400℃), as well as insulating specifications such as alumite treatment (400℃) and alumina coating. The chuck surface has a GND terminal, so it can be connected to the GND of a measuring instrument, etc.
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Product
Film heating wafer hot chuck/PH101, 201, 301, 050 series
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Handling Company
MSA Factory Co., Ltd.
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Categories
8 Models of Film heating wafer hot chuck/PH101, 201, 301, 050 series
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Compatible temperature controller | Features | Maximum temperature | Plate material | Plate size | Power supply voltage | Surface treatment |
|---|---|---|---|---|---|---|---|---|---|
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PH050 |
Available upon quote | PCC100G, PCC107 |
Smallest size hot chuck, With laser marking marker |
300℃ | Aluminum alloy | 30×40mm | AC100V | Black alumite treatment |
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PH070 |
Available upon quote | PCC100G, PCC107 |
Laser marking with marker |
300℃ | Aluminum alloy | 70×70mm | AC100V | Black alumite treatment |
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PH101 |
Available upon quote | PCC100G, PCC107 | - | 200℃ | Aluminum alloy | 100×100mm | AC100V | Black alumite treatment |
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PH101-TIN |
Available upon quote | PCC100G, PCC107 | SiO vapor deposition film treatment | 300℃ | Aluminum alloy | 100×100mm | AC100V | SiO vapor deposited film |
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PH201-O |
Available upon quote | PCC100G, PCC107 |
Mechanical clamp vacuum chuck |
200℃ | Aluminum alloy | 4~6” | AC100V | Black alumite treatment |
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PH201-C |
Available upon quote | PCC100G, PCC107 |
Gold plating treatment, hot plate insulation treatment, Air cooling (using compressed air) function |
200, 400℃ | Aluminum alloy | 70×70mm | AC100V | Gold plating treatment |
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PH302 |
Available upon quote | PCC100G, PCC107 | - | 200℃ | Aluminum alloy | 250×250mm | AC100V | Black alumite treatment |
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PH101-T |
Available upon quote | PCC100G, PCC107 |
With mechanical clamp function, Gold plating treatment, hot plate insulation treatment |
300℃ | Aluminum alloy | 4 | AC100V | Gold plating treatment |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan