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  1. Metoree
  2. Heat Sources
  3. Plate Heaters
  4. Wafer/film heating film hot chuck/PA20-FC series (MSA Factory Co., Ltd.)
Wafer/film heating film hot chuck/PA20-FC series-PA2012-FC
Wafer/film heating film hot chuck/PA20-FC series-PA2020-FC
Wafer/film heating film hot chuck/PA20-FC series-MSA Factory Co., Ltd.

Wafer/film heating film hot chuck/PA20-FC series
MSA Factory Co., Ltd.

MSA Factory Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

149.2hours

About This Product

■Main uses

For heating processes such as films and thin glass substrates, up to a maximum temperature of 200℃.

■Adsorption function using porous ceramic/Porous chuck method

Since adsorption is performed using porous ceramic, the pore diameter of the through-hole (adsorption pore) does not affect the workpiece. Even thin film-like workpieces can be heated evenly without deformation.

■Also available with waterproof function - WPFC series

Due to its waterproof function, this hot plate can also be used in processes such as heating and spray coating.

■Digital temperature controller

Connects to MSA factory standard temperature controller with one-touch connector. Highly accurate temperature control can be performed immediately with simple operations.

■Vacuum pump for adsorption

Powerful suction (chuck) can be performed with a small diaphragm pump. It is sold in a configuration with a pump.

  • Product

    Wafer/film heating film hot chuck/PA20-FC series

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5 Models of Wafer/film heating film hot chuck/PA20-FC series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Power supply voltage Compatible temperature controller Features Maximum temperature Plate material Plate size Option
Wafer/film heating film hot chuck/PA20-FC series-Part Number-PA2012-FC

PA2012-FC

Available upon quote

AC100V

PCC100G, PCC107Co

Porous ceramic adsorption hot chuck

200℃

Porous ceramic (alumina), porous chuck

□120mm

Vacuum pump for adsorption, with fittings

Wafer/film heating film hot chuck/PA20-FC series-Part Number-PA2020-FC

PA2020-FC

Available upon quote

AC100V

PCC100G, PCC107Co

Porous ceramic adsorption hot chuck

200℃

Porous ceramic (alumina), porous chuck

□200mm

Vacuum pump for adsorption, with fittings

Wafer/film heating film hot chuck/PA20-FC series-Part Number-PA2012-WPFC

PA2012-WPFC

Available upon quote

AC100V

PCC100G, PCC107Co

Porous ceramic adsorption hot chuck waterproof type

200℃

Porous ceramic (alumina), porous chuck

□120mm

Vacuum pump for adsorption, with fittings

Wafer/film heating film hot chuck/PA20-FC series-Part Number-PA2020-WPFC

PA2020-WPFC

Available upon quote

AC100V

PCC100G, PCC107Co

Porous ceramic adsorption hot chuck waterproof type

200℃

Porous ceramic (alumina), porous chuck

□200mm

Vacuum pump for adsorption, with fittings

Wafer/film heating film hot chuck/PA20-FC series-Part Number-PA2045-FC

PA2045-FC

Available upon quote

AC100V

PCC100G, PCC107Co

Porous ceramic adsorption hot chuck

200℃

Porous ceramic (alumina), porous chuck

450×300mm

Vacuum pump for adsorption, with fittings

Click on the part number for more information about each product

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About Company Handling This Product

MSA Factory Co., Ltd.

Response Rate

100.0%

Response Time

149.2hrs

  • Japan

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Plate Heaters
Plate Heaters　MSA Factory Co., Ltd.
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