Wafer/film heating film hot chuck/PA20-FC series
MSA Factory Co., Ltd.
About This Product
■Main uses
For heating processes such as films and thin glass substrates, up to a maximum temperature of 200℃.
■Adsorption function using porous ceramic/Porous chuck method
Since adsorption is performed using porous ceramic, the pore diameter of the through-hole (adsorption pore) does not affect the workpiece. Even thin film-like workpieces can be heated evenly without deformation.
■Also available with waterproof function - WPFC series
Due to its waterproof function, this hot plate can also be used in processes such as heating and spray coating.
■Digital temperature controller
Connects to MSA factory standard temperature controller with one-touch connector. Highly accurate temperature control can be performed immediately with simple operations.
■Vacuum pump for adsorption
Powerful suction (chuck) can be performed with a small diaphragm pump. It is sold in a configuration with a pump.
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Product
Wafer/film heating film hot chuck/PA20-FC series
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Handling Company
MSA Factory Co., Ltd.
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Categories
5 Models of Wafer/film heating film hot chuck/PA20-FC series
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Compatible temperature controller | Features | Maximum temperature | Option | Plate material | Plate size | Power supply voltage |
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PA2012-FC |
Available upon quote | PCC100G, PCC107Co | Porous ceramic adsorption hot chuck | 200℃ | Vacuum pump for adsorption, with fittings | Porous ceramic (alumina), porous chuck | □120mm | AC100V |
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PA2020-FC |
Available upon quote | PCC100G, PCC107Co | Porous ceramic adsorption hot chuck | 200℃ | Vacuum pump for adsorption, with fittings | Porous ceramic (alumina), porous chuck | □200mm | AC100V |
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PA2012-WPFC |
Available upon quote | PCC100G, PCC107Co | Porous ceramic adsorption hot chuck waterproof type | 200℃ | Vacuum pump for adsorption, with fittings | Porous ceramic (alumina), porous chuck | □120mm | AC100V |
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PA2020-WPFC |
Available upon quote | PCC100G, PCC107Co | Porous ceramic adsorption hot chuck waterproof type | 200℃ | Vacuum pump for adsorption, with fittings | Porous ceramic (alumina), porous chuck | □200mm | AC100V |
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PA2045-FC |
Available upon quote | PCC100G, PCC107Co | Porous ceramic adsorption hot chuck | 200℃ | Vacuum pump for adsorption, with fittings | Porous ceramic (alumina), porous chuck | 450×300mm | AC100V |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan