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Film heating wafer hot chuck/PH201 series-PH201-K-04
Film heating wafer hot chuck/PH201 series-PH201-S-04
Film heating wafer hot chuck/PH201 series-MSA Factory Co., Ltd.

Film heating wafer hot chuck/PH201 series
MSA Factory Co., Ltd.


About This Product

■Main uses

Temperature characteristics test for wafers, hot chuck glass chuck for probe mounting, electrical characteristics test of substrates

■Digital temperature controller

Connects to MSA factory standard temperature controller with one-touch connector. Highly accurate temperature control can be performed immediately with simple operations.

■Universal chuck pattern

Standard suction pattern: If you place the workpiece in the center suction hole, the size is universal. Example: A 6” chuck can be used with 6”, 4”, 3” and any size smaller than 6”.

■Chuck surface conductivity/insulation/leakage

There are two types of chuck surfaces: gold-plated (200℃) conductive specifications and alumite-treated (200℃) insulating specifications.

  • Product

    Film heating wafer hot chuck/PH201 series

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4 Models of Film heating wafer hot chuck/PH201 series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Power supply voltage Compatible temperature controller Surface treatment Features Maximum temperature Plate material Plate size Option
Film heating wafer hot chuck/PH201 series-Part Number-PH201-K-04

PH201-K-04

Available upon quote

AC100V

PCC100G, PCC107

Gold plated

Standard configuration

200℃

Aluminum alloy

4

Prober mounting adapter (customized)

Film heating wafer hot chuck/PH201 series-Part Number-PH201-S-04

PH201-S-04

Available upon quote

AC100V

PCC100G, PCC107

Black anodized aluminum

Standard configuration

200℃

Aluminum alloy

4

Prober mounting adapter (customized)

Film heating wafer hot chuck/PH201 series-Part Number-PH201-K-06

PH201-K-06

Available upon quote

AC100V

PCC100G, PCC107

Gold plated

Standard configuration

200℃

Aluminum alloy

6”

Prober mounting adapter (customized)

Film heating wafer hot chuck/PH201 series-Part Number-PH201-S-06

PH201-S-06

Available upon quote

AC100V

PCC100G, PCC107

Black anodized aluminum

Standard configuration

200℃

Aluminum alloy

6”

Prober mounting adapter (customized)

Click on the part number for more information about each product

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