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Single-axis and multi-axis motion stages available Standard stage-FBS100100
Single-axis and multi-axis motion stages available Standard stage-FRS060360
Single-axis and multi-axis motion stages available Standard stage-FGS013S125
Single-axis and multi-axis motion stages available Standard stage-FBZ085010
Single-axis and multi-axis motion stages available Standard stage-Koen Co., Ltd.

Single-axis and multi-axis motion stages available Standard stage
Koen Co., Ltd.


About This Product

NanoMotion's standard stages offer single-axis and multi-axis motion performance for a wide range of applications in the semiconductor, biomedical, and instrumentation markets. The standard stage is driven by an HR motor (an ultrasonic motor manufactured by Nanomotion) and consists of closed-loop servo motion with an optical encoder. Modular design allows for easy mounting using standard angle brackets. All axes use precision crossed roller bearings with high stiffness and optical encoders for precise positioning. We offer standard atmospheric pressure models, ISO class 3 clean room compatible models, and vacuum models. We also provide custom support for applications that are not suitable for standard stage configurations.

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    Single-axis and multi-axis motion stages available Standard stage

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5 Models of Single-axis and multi-axis motion stages available Standard stage

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Static holding force Allowable load Absolute accuracy (error map available) Travel range (mm) Vacuum compatible options Straightness and flatness Maximum speed Minimum feed amount for each mode (depends on encoder and control) Moving mass Bidirectional repeatability Dynamic stall force Rigidity Motor Bearing type Pitch & yaw Stage mass Stage plate material Cable length Encoder resolution Encoder RoHS MTBF (Mean Time to Failure) Load inertia capacity Movable inertial mass Allowable load - horizontal Allowable load - vertical
Single-axis and multi-axis motion stages available Standard stage-Part Number-FBS100100

FBS100100

Available upon quote - -

Standard 10μm
Option 7μm

100mm

High vacuum (HV) up to 1.4×10-5Pa (10-7 Torr)
Ultra High Vacuum (UHV) up to 1.4×10-8Pa (10-10 Torr)

±4μm

Maximum speed 250mm/sec

AC mode 100nm
UHR mode 5nm
DC mode <1nm

710g

Standard 1μm
Option 100nm

32N

3N/μm

HR8 motor

Precision cross roller bearing, with roller movement and anti-slip function

±50μrad

1,811g

Aluminum - black anodized

3m

Standard 100nm
Option 10nm

Optical linear encoder with gold tape scale

Compatibility

30,000Hr

- -

2.7kg

0.4kg

Single-axis and multi-axis motion stages available Standard stage-Part Number-FRS060360

FRS060360

Available upon quote -

2kg

Standard 10arc sec.
Option 5arc sec.

Nx 360

High vacuum (HV) up to 1.4×10-5Pa (10-7 Torr)
Ultra High Vacuum (UHV) up to 1.4×10-8Pa (10-10 Torr)

±5μm

8.3rad sec.

-

268g

Standard 50arc sec.
Option 5arc sec.

0.96Nm

0.0032 (Nm/μrad)

HR2 motor

Precision cross roller bearing, with roller movement and anti-slip function

-

581g

Aluminum - black anodized

3m

Standard 5arc sec.
Option 0.5arc sec.

Optical linear encoder with gold tape scale

Compatibility

30,000Hr

0.0035kg.m²

0.102gr-m²

- -
Single-axis and multi-axis motion stages available Standard stage-Part Number-FGS013S125

FGS013S125

Available upon quote

1836Nm

3kg

-

±10°

High vacuum (HV) up to 1.4×10-5Pa (10-7 Torr)
Ultra High Vacuum (UHV) up to 1.4×10-8Pa (10-10 Torr)

-

100deg/sec

AC mode 0.165arc sec.
UHR mode 0.0082 arc sec.
DC mode 0.000165 arc sec.

461g

Standard 2arc sec.
Option 0.2arc sec.

2,040Nm

0.045 N m/μrad

HR4 motor

Precision cross roller bearing, with roller movement and anti-slip function

-

773g

Aluminum - black anodized

3m

Standard 0.171arc sec.
Option 0.0171arc sec.

Optical linear encoder with gold tape scale

Compatibility

30,000Hr

0.0512kg.m²

- - -
Single-axis and multi-axis motion stages available Standard stage-Part Number-FGS013S160

FGS013S160

Available upon quote

2340Nm

3kg

-

±10

High vacuum (HV) up to 1.4×10-5Pa (10-7 Torr)
Ultra High Vacuum (UHV) up to 1.4×10-8Pa (10-10 Torr)

-

85deg/sec

AC mode 0.128arc sec.
UHR mode 0.0064 arc sec.
DC mode 0.000129 arc sec.

423g

Standard 2arc sec.
Option 0.2arc sec.

2,600Nm

0.074 N m/μrad

HR4 motor

Precision cross roller bearing, with roller movement and anti-slip function

-

842g

Aluminum - black anodized

3m

Standard 0.134arc sec.
Option 0.0134arc sec.

Optical linear encoder with gold tape scale

Compatibility

30,000Hr

0.083kg.m²

- - -
Single-axis and multi-axis motion stages available Standard stage-Part Number-FBZ085010

FBZ085010

Available upon quote

150N

5kg

Standard 3μm

10mm

High vacuum (HV) up to 1.4×10-5Pa (10-7 Torr)
Ultra High Vacuum (UHV) up to 1.4×10-8Pa (10-10 Torr)

±2μm

50mm/sec

AC mode 100nm
UHR mode 5nm
DC mode <1nm

310g

Standard 0.1μm

160N

57N/μm

HR8 motor (piezo ultrasonic standing wave motor)

Precision cross roller bearing, with roller movement and anti-slip function

±30μrad

1300g

Aluminum - black anodized

3m

Standard 10nm

Optical linear encoder with gold tape scale

Compatibility

30,000Hr

- - - -

Click on the part number for more information about each product

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