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  3. FPD Lithography Equipment
  4. UV nanoimprint stepper ImpFlex-Essential Stepper (Sanmei Co., Ltd.)
UV nanoimprint stepper ImpFlex-Essential Stepper-ImpFlex-Essential Stepper
UV nanoimprint stepper ImpFlex-Essential Stepper-Sanmei Co., Ltd.

UV nanoimprint stepper ImpFlex-Essential Stepper
Sanmei Co., Ltd.

About This Product

■Three types of nanoimprint devices

・Small mold. nanoimprint stepper ・Batch full-scale transfer. All at once using a large mold ・Flat roll type. Roll transfer method using large resin mold

■Features

・Supports 2 to 8 inch wafers ・High precision alignment required for device manufacturing ・Highly accurate transfer pressure control ・Additional heating mechanism option

  • Product

    UV nanoimprint stepper ImpFlex-Essential Stepper

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1 Models of UV nanoimprint stepper ImpFlex-Essential Stepper

Image Part Number Price (excluding tax) Adaptive work Transfer method External dimensions Resist coating Mold Alignment accuracy
UV nanoimprint stepper ImpFlex-Essential Stepper-Part Number-ImpFlex-Essential Stepper

ImpFlex-Essential Stepper

Available upon quote

Φ2~8 inches

UV nanoimprint

1,800 (H) ×760 (W) ×1,160 (D)

Spin coater or
Inkjet pretreatment

Quartz mold, PDMS mold

1μm (depending on alignment mark size)

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About Company Handling This Product

Sanmei Co., Ltd.

  • Japan

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