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  4. Fully automatic mask aligner ALA410 (Sanmei Co., Ltd.)

Fully automatic mask aligner ALA410
Sanmei Co., Ltd.

Sanmei Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

58.6hours

Company Review

5.0

About This Product

Fully automatic exposure equipment for mass production process

■Features

・High versatility (compatible with 〇-type and □-type samples) ・Highly reliable spherical bearing parallel mechanism ・Simple structure and low price

  • Product

    Fully automatic mask aligner ALA410

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1 Models of Fully automatic mask aligner ALA410

Image Part Number Price (excluding tax) Exposure resolution Exposure light source Weight Equipment dimensions Size Alignment accuracy

ALA410

Available upon quote

・Soft contact L/S3μm
・Hard contact L/S1μm

Illuminance distribution within ±5%

900kg

2,100 (H) × 1,300 (W) × 1,500 (D) mm
Freestanding

4in

Top-side ±1μm
Bottom-side ±3μm

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About Company Handling This Product

Sanmei Co., Ltd.

Response Rate

100.0%

Response Time

58.6hrs

Company Review

5.0
  • Japan

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Lithographers　Sanmei Co., Ltd.
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