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Composite material AC-Alox-AC-Alox
Composite material AC-Alox-Advance Composite Co., Ltd.

Composite material AC-Alox
Advance Composite Co., Ltd.


About This Product

■Summary

・Aluminum/alumina composite material ・As light as aluminum, with Young's modulus higher than cast iron ・Excellent vibration damping properties

■Features

・Has been used in a vacuum environment (medium vacuum 10⁻¹Pa or less) ・Semiconductor manufacturing equipment cleaning fluorine gas resistant ・Cutting possible ・Easy surface treatment (electroless Ni plating, etc.)

■Applications

・Lifter pin for FPD manufacturing equipment Reason for adoption: Fluorine resistant gas that does not damage glass ・Movable stage for semiconductor measurement equipment Reason for adoption: Light weight, high rigidity, and excellent vibration damping properties

  • Product

    Composite material AC-Alox

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1 Models of Composite material AC-Alox

Image Part Number Price (excluding tax) Manufacturing method Thermal expansion coefficient (ppm/K) Thermal conductivity (W/m・k) Specific stiffness (GPa-g/cm3) Standard size (mm) (Existing equipment and track record) Material Bending strength (MPa) Strengthener (Vol%) Density (g/cm3) Processability Volume resistivity value (Ω・cm) Young's modulus (GPa) AI (Vol%)
Composite material AC-Alox-Part Number-AC-Alox

AC-Alox

Available upon quote

High pressure casting

13

90

47

200sp×80t

AI/AI203

450

50

3.2

Diamond cutting

1.4×10^-5

150

50

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