Mass flow controller-MC/MCR series (standard type)

Mass flow controller-MCS/MCRS series (corrosive gas/refrigerant gas compatible)

Mass flow controller-MCW/MCRW series (low pressure loss type)

Mass flow controller-MCQ/MCRQ series (high pressure type)

Mass flow controller-MCE/MCES series (SEMI standard: High precision mass flow controller for semiconductor equipment)

Mass flow controller-MCV/MCVS series (equipped with shutoff valve)

Mass flow controller-BASIS series (small low cost mass flow controller for OEM supply)

Mass flow controller
Japan Star Techno Co., Ltd.

Japan Star Techno Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

8.9hours

Fast Response

About This Product

Features
■Achieving stable delivery timesALICAT has its own factory in Arizona, USA, and has developed based on the experience and knowledge cultivated over many years. We are developing models that are compatible with various uses, and can meet a variety of needs. In recent years, we have significantly increased our workforce and production equipment, making stable supply possible.

■Suitable for various usesWe have a lineup of mass flow controllers compatible with various environments, including the standard type MC/MCR series.

■A wide variety of gases can be measuredThe standard type is compatible with 98 types of gases including mixed gases. In addition, the corrosive gas/refrigerant gas compatible type is compatible with 128 types of gases in addition to standard gas types.

■100ms fast control response・High-speed response achieved by laminar flow method (differential pressure type).
- Quickly follows flow rate changes and allows you to check the flow rate in real time.

■200:1 wide flow range *100:1 for MCS/MCRS/MCVS series・Lineup ranges from ultra-low flow rate 0.5SCCM to large flow rate 5000SLPM. (*MC/MCR/MS/MCRS/MCD/MCRD series)

■In addition to mass flow, pressure and temperature are also measured.・In addition to mass flow, volume flow, pressure, and temperature are also displayed on the display screen.
・You can also change the display unit of each data. The value converted to that unit will be displayed.

■Equipped with backlit monochrome LCD display as standardEquipped with a monochrome LCD with backlight as standard. The backlight can be easily turned on/off by button operation.

■Equipped with analog output/RS-232C communication as standard・Equipped with 0-5VDC output as standard. Analog output of mass flow.
・In addition to mass flow, output data can also include volume flow, pressure, and temperature. You can also specify 0-10VDC, 1-5VDC, and 4-20mA output.
- RS-232C communication outputs mass flow, volume flow, pressure, temperature, and gas type.

■Cumulative flow rate possible・It is possible to display the cumulative flow rate by adding the cumulative flow option.
- Flow rate integration starts after power is turned on and after reset.

■PipingThe connection diameter is NPT standard female thread.

■CalibrationCalibration is done by the manufacturer. Normally, calibration is performed at 20℃ 1atm, but you can also specify calibration at 0℃ 1atm.

Model
There are 10 models available for this product.

Product
Mass flow controller

Handling Company
Japan Star Techno Co., Ltd.

Categories

Meters & Instruments

Flow Meters

Controllers

Mass Flow Controllers

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10 Models of Mass flow controller

Click on the part number for more information about each product

Part Number	Price (excluding tax)	Port size (flow range 0.5SCCM)	Dimensions (flow range 0.5SCCM)	Pressure loss at F.S. flow rate
MC/MCR series (standard type)	Available upon quote	M5 (10-32) female thread	H98.98mm x W84.79mm x D26.67mm	6.89kPa (D)
MCS/MCRS series (corrosive gas/refrigerant gas compatible)	Available upon quote	M5 (10-32) female thread	H111.68mm x W84.79mm x D26.67mm	6.89kPa (D)
MCW/MCRW series (low pressure loss type)	Available upon quote	M5 (10-32) female thread	H98.98mm x W84.79mm x D26.67mm	0.483kPa (D)
MCQ/MCRQ series (high pressure type)	Available upon quote	-	-	-
MCE/MCES series (SEMI standard: High precision mass flow controller for semiconductor equipment)	Available upon quote	-	-	-
MCV/MCVS series (equipped with shutoff valve)	Available upon quote	-	-	-
BASIS series (small low cost mass flow controller for OEM supply)	Available upon quote	-	-	-
BIO series (high precision flow controller for bioreactors)	Available upon quote	-	-	-
PC/PC3/PCD/PCR series (pressure controller)	Available upon quote	-	-	-
MCD/MCRD series (dual valve)	Available upon quote	-	-	-

Click on the part number for more information about each product

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About Company Handling This Product

Japan Star Techno Co., Ltd.

Response Rate

100.0%

Response Time

8.9hrs

Japan

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Mass flow controller Japan Star Techno Co., Ltd.

Japan Star Techno Co., Ltd.'s Response Status

About This Product

■Achieving stable delivery times

■Suitable for various uses

■A wide variety of gases can be measured

■100ms fast control response

■200:1 wide flow range *100:1 for MCS/MCRS/MCVS series

■In addition to mass flow, pressure and temperature are also measured.

■Equipped with backlit monochrome LCD display as standard

■Equipped with analog output/RS-232C communication as standard

■Cumulative flow rate possible

■Piping

■Calibration

10 Models of Mass flow controller

Customers who viewed this product also viewed

Other products of Japan Star Techno Co., Ltd.

About Company Handling This Product

Related search keywords

Mass flow controller
Japan Star Techno Co., Ltd.