Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode-Rectangular, circular, cathode

Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode
FORU LIMITED.

About This Product

Specifications to meet your requirements. Direct backplate target cooling.

■Specifications and features-Direct target cooling allows maximum power density
・Cooling in close contact with the target can achieve maximum effect regardless of high or low power.
・The entire magnetron can be constantly cooled at a constant temperature using a unique cooling water path.
・Can be installed internally or externally
・KF, ISO, CF connection possible
・Can be used with 5 x 10-4 mbr or less
・Unique magnetic pole arrangement also supports UMBS arrangement
・A cooling structure that does not put any strain on the target prevents it from deforming.
・Cathode manufacturing based on simulation of target material, power supply, target-substrate distance, and degree of vacuum

■Realizes amazing target usage efficiency・Unique multiple magnet array
・Compatible with various metal targets Cr, Cu, Ti, Al, etc.
・Suitable for high power sputtering
・Usage efficiency >40%

Model
There is 1 model available for this product.

Product
Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode

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FORU LIMITED.

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1 Models of Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode

Image	Part Number	Price (excluding tax)
	Rectangular, circular, cathode	Available upon quote

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About Company Handling This Product

FORU LIMITED.

Japan

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Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode FORU LIMITED.

About This Product

■Specifications and features

■Realizes amazing target usage efficiency

1 Models of Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode

Rectangular, circular, cathode

Other products of FORU LIMITED.

About Company Handling This Product

Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode
FORU LIMITED.