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  2. Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode (FORU LIMITED.)
Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode-Rectangular, circular, cathode
Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode-FORU LIMITED.

Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode
FORU LIMITED.

FORU LIMITED.'s Response Status

Response Rate

100.0%

Response Time

25.3hours

Relatively Fast Response

About This Product

Specifications to meet your requirements. Direct backplate target cooling.

■Specifications and features

-Direct target cooling allows maximum power density ・Cooling in close contact with the target can achieve maximum effect regardless of high or low power. ・The entire magnetron can be constantly cooled at a constant temperature using a unique cooling water path. ・Can be installed internally or externally ・KF, ISO, CF connection possible ・Can be used with 5 x 10-4 mbr or less ・Unique magnetic pole arrangement also supports UMBS arrangement ・A cooling structure that does not put any strain on the target prevents it from deforming. ・Cathode manufacturing based on simulation of target material, power supply, target-substrate distance, and degree of vacuum

■Realizes amazing target usage efficiency

・Unique multiple magnet array ・Compatible with various metal targets Cr, Cu, Ti, Al, etc. ・Suitable for high power sputtering ・Usage efficiency >40%

  • Product

    Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode

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1 Models of Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode

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Also compatible with HIPIMS Long life and high efficiency rectangular, circular, cathode-Part Number-Rectangular, circular, cathode

Rectangular, circular, cathode

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About Company Handling This Product

FORU LIMITED.

Response Rate

100.0%

Response Time

25.3hrs

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