DC Powered iPA Platform
FORU LIMITED.

FORU LIMITED.'s Response Status

Response Rate

100.0%

Response Time

25.3hours

Relatively Fast Response

About This Product

The high-quality, reliable DC-powered iPA platform delivers superior process consistency and control, significantly minimizing variation and increasing yield in industrial vacuum plasma processes across a wide range of applications. The iPA series of 3U rack-mountable air-cooled plasma power supplies with a full-featured front panel allows for easy local control and provides comprehensive remote functionality with extensive analog interfaces.

The included Profibus, DeviceNet, and RS-232 digital interfaces make it easy to integrate iPA into your system design. All models are cooled by air cooling.

■Features・Achieves high quality film formation and high speed throughput
・Reduces damage to films, substrates, and equipment
- Stable throughput and power supply is possible even under extreme arc discharge conditions. Can output in constant voltage mode (50V or more)
・Ultra-fast arc removal and return to normal operation in the shortest possible time. Plasma restart time after short arcing 12 μs
・High efficiency of over 95%
・Easy integration and control
・High reliability and low price

■Application・Sputter/PVD
·etching

■Specifications・500W~15KW (Option 20KW)
・Joule mode - optimized energy supply
・Air cooling
・Passive front panel
-Interfaces: Profibus, DeviceNet, RS-232/485 and analog user ports

Model
There are 6 models for this product.

Product
DC Powered iPA Platform

Handling Company
FORU LIMITED.

Categories

Power Supplies

DC Power Supplies

210+ people viewing

Last viewed: 7 hours ago

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6 Models of DC Powered iPA Platform

Click on the part number for more information about each product

Part Number	Price (excluding tax)	Power control accuracy	Mass	Ignition voltage	Maximum current	Maximum voltage	Maximum output power	External dimensions	Attachment	Control method	Cooling method	Fuse	DC output connector	AC input voltage	AC input connector
IPA-0580	Available upon quote	Within ±1% of current, voltage, or power setting value	26Kg	>1,500V	14A	800V	5KW	631mm (D) x 483mm (W) x 132.5mm (H) 25.08" (D) x 19.01" (W) x 5.22" (H)	19" rack mountable, 3U height	Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control)	Forced air cooling maximum ambient temperature 40℃	3 x 32A 3 x 16A	Harting Han Modular 2 Module	208Vac ±5, 3 phase, 50/60Hz 400Vac ±10, 3 phase, 50/60Hz (optional)	Harting Han Modular 3 Module
IPA-05100	Available upon quote	Within ±1% of current, voltage, or power setting value	26Kg	>1,500V	10A	1,000V	5KW	631mm (D) x 483mm (W) x 132.5mm (H) 25.08" (D) x 19.01" (W) x 5.22" (H)	19" rack mountable, 3U height	Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control)	Forced air cooling maximum ambient temperature 40℃	3 x 32A 3 x 16A	Harting Han Modular 2 Module	208Vac ±5, 3 phase, 50/60Hz 400Vac ±10, 3 phase, 50/60Hz (optional)	Harting Han Modular 3 Module
IPA-1080	Available upon quote	Within ±1% of current, voltage, or power setting value	28Kg	>1,500V	25A	800V	10KW	631mm (D) x 483mm (W) x 132.5mm (H) 25.08" (D) x 19.01" (W) x 5.22" (H)	19" rack mountable, 3U height	Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control)	Forced air cooling maximum ambient temperature 40℃	3 x 40A 3 x 20A	Harting Han Modular 2 Module	208Vac ±5, 3 phase, 50/60Hz 400Vac ±10, 3 phase, 50/60Hz (optional)	Harting Han Modular 3 Module
IPA-10100	Available upon quote	Within ±1% of current, voltage, or power setting value	28Kg	>1,500V	20A	1,000V	10KW	631mm (D) x 483mm (W) x 132.5mm (H) 25.08" (D) x 19.01" (W) x 5.22" (H)	19" rack mountable, 3U height	Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control)	Forced air cooling maximum ambient temperature 40℃	3 x 40A 3 x 20A	Harting Han Modular 2 Module	208Vac ±5, 3 phase, 50/60Hz 400Vac ±10, 3 phase, 50/60Hz (optional)	Harting Han Modular 3 Module
IPA-1580	Available upon quote	Within ±1% of current, voltage, or power setting value	30Kg	>1,500V	30A	800V	15KW	631mm (D) x 483mm (W) x 132.5mm (H) 25.08" (D) x 19.01" (W) x 5.22" (H)	19" rack mountable, 3U height	Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control)	Forced air cooling maximum ambient temperature 40℃	3 x 50A 3 x 25A	Harting Han Modular 2 Module	208Vac ±5, 3 phase, 50/60Hz 400Vac ±10, 3 phase, 50/60Hz (optional)	Harting Han Modular 3 Module
IPA-15100	Available upon quote	Within ±1% of current, voltage, or power setting value	30Kg	>1,500V	25A	1,000V	15KW	631mm (D) x 483mm (W) x 132.5mm (H) 25.08" (D) x 19.01" (W) x 5.22" (H)	19" rack mountable, 3U height	Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control)	Forced air cooling maximum ambient temperature 40℃	3 x 50A 3 x 25A	Harting Han Modular 2 Module	208Vac ±5, 3 phase, 50/60Hz 400Vac ±10, 3 phase, 50/60Hz (optional)	Harting Han Modular 3 Module

Click on the part number for more information about each product

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About Company Handling This Product

FORU LIMITED.

Response Rate

100.0%

Response Time

25.3hrs

Japan

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DC Powered iPA Platform FORU LIMITED.

FORU LIMITED.'s Response Status

About This Product

■Features

■Application

■Specifications

6 Models of DC Powered iPA Platform

IPA-0580

IPA-05100

IPA-1080

IPA-10100

IPA-1580

IPA-15100

Customers who viewed this product also viewed

Other products of FORU LIMITED.

About Company Handling This Product

Related search keywords

DC Powered iPA Platform
FORU LIMITED.