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  2. Plasma emission real monitor EMICON SA series (FORU LIMITED.)
Plasma emission real monitor EMICON SA series-SA series
Plasma emission real monitor EMICON SA series-FORU LIMITED.

Plasma emission real monitor EMICON SA series
FORU LIMITED.

FORU LIMITED.'s Response Status

Response Rate

100.0%

Response Time

25.3hours

Relatively Fast Response

About This Product

■Summary

・PC built-in ・LAN,Profibus,Digital Applications for EMICON

■Troubleshooting

You can monitor the change in the specified wavelength peak over time and understand the process status. If you record the light emitting state during normal processes, you can quickly determine the cause of the abnormality by comparing it with the light emitting state where the abnormality occurred.

■Process development

Increasing the gas flow rate and power increases the emission intensity. Also, if multiple gases are injected at the same time, the emission intensity will change compared to injecting each gas individually, even if the power and flow conditions are the same. Therefore, a luminescence intensity monitor can be used as a reference meter when conditions change.

■Reactive sputter deposition control

・1.4nm high resolution spectrometer ・200-1,100nm wide area monitor ・Control using noise component removal wavelength - Easily switch to a different type of target process in seconds by simply changing the recipe.

  • Product

    Plasma emission real monitor EMICON SA series

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1 Models of Plasma emission real monitor EMICON SA series

Image Part Number Price (excluding tax) Power supply Screen Wavelength range (nm) Resolution Digital in/outputs Number of channels Analog outputs Analog inputs Processor unit
Plasma emission real monitor EMICON SA series-Part Number-SA series

SA series

Available upon quote

5VDC 4A

5.7 inch touch panel

200 - 1,100

1.4nmFWHM

8 (16)xTTL/24V (Opto-Coupler)

1 - 8

4 (8) x0-10volts (iCoupler)

2 (4,8) x0-10volts (iCoupler)

Integrated MPU

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About Company Handling This Product

FORU LIMITED.

Response Rate

100.0%

Response Time

25.3hrs

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