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  2. Plasma emission real monitor EMICON HR series (FORU LIMITED.)
Plasma emission real monitor EMICON HR series-HR series
Plasma emission real monitor EMICON HR series-FORU LIMITED.

Plasma emission real monitor EMICON HR series
FORU LIMITED.

FORU LIMITED.'s Response Status

Response Rate

100.0%

Response Time

25.3hours

Relatively Fast Response

About This Product

Applications for EMICON

■Troubleshooting

You can monitor the change in the specified wavelength peak over time and understand the process status. If you record the light emitting state during normal processes, you can quickly determine the cause of the abnormality by comparing it with the light emitting state where the abnormality occurred.

■Process development

Increasing the gas flow rate and power increases the emission intensity. Also, if multiple gases are injected at the same time, the emission intensity will change compared to injecting each gas individually, even if the power and flow conditions are the same. Therefore, a luminescence intensity monitor can be used as a reference meter when conditions change.

■Reactive sputter deposition control

・1.4nm high resolution spectrometer ・200-1,100nm wide area monitor ・Control using noise component removal wavelength - Easily switch to a different type of target process in seconds by simply changing the recipe.

  • Product

    Plasma emission real monitor EMICON HR series

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1 Models of Plasma emission real monitor EMICON HR series

Image Part Number Price (excluding tax) Power supply Wavelength range (nm) Resolution (nm) Signal resolution Digital in/out Number of channels Analog in/out PC connection
Plasma emission real monitor EMICON HR series-Part Number-HR series

HR series

Available upon quote

AC 100V

200-860

0.15FWHM

16 Bit

2/2 BNC

1

4BNC

USB 2.0

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About Company Handling This Product

FORU LIMITED.

Response Rate

100.0%

Response Time

25.3hrs

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