Spectral and pulse monitoring system EMICON SA-HIPIMS
XQ Instruments
About This Product
The EMICON SA-HIPIMS system is an upgraded version of the EMICON SA system. It has the ability to continuously acquire electrical pulse data with high resolution while making spectral measurements useful for controlling process gases.
By measuring the pulse waveform with a high resolution of 25 ns, both the pulse current and pulse voltage values can be accurately recorded. This means that, for example, changes in the pulse waveform that occur during the transition from metal mode to reactive mode will not be missed. Pulse and spectral data are simultaneously recorded on the instrument via an integrated trigger input.
By consolidating spectral data and electrical data in the same device, it is possible to simultaneously control ion density and reactive gas. This is a particularly important element in the HIPIMS process.
Thus, by using the EMICON SA-HIPIMS system, its users can selectively and individually control morphological properties (e.g. film density) and stoichiometric properties (chemical composition ratio) during film deposition. It becomes.
It is also possible to suppress parameter fluctuations caused by target erosion, which many users suffer from during the HIPIMIS process. As the thickness and shape of the target change, the magnetic field leaking from its surface constantly changes.
It has a significant impact on peak current and ion density which can have a significant impact on the HIPIMS process. The EMICON SA-HIPIMS system detects peak currents with high resolution and automatically compensates (closed loop) to minimize their effects, achieving stable processes throughout the target life.
■Features
・Monitor all spectra that appear within the sensing range of the sensor
・Recording electrical signals with high resolution
・Real-time recording of current and voltage in pulse process (HIPIMS)
・Monitoring and analysis of pulse curves
・Simultaneous pulse and spectrum recording with analog and optical trigger inputs
・Real-time spectral and electrical fusion control
・LAN control using dedicated software on Windows OS
-
Product
Spectral and pulse monitoring system EMICON SA-HIPIMS
-
Handling Company
XQ Instruments
-
Categories
1 Models of Spectral and pulse monitoring system EMICON SA-HIPIMS
| Product Image | Part Number | Price (excluding tax) | Analog control output | Analog pulse input | Connection | Number of spectrometer channels | Pulse trigger input | Sampling rate | Support fieldbus | Type |
|---|---|---|---|---|---|---|---|---|---|---|
|
|
EMICON SA-HIPIMS |
Available upon quote | 0-10 volts (4/8) | ±1V (2x) | LAN (TCP/IP) | 1-8 | Analog ±5V (1x), optical (2x) | 40MHz | Profibus, Profinet, EtherCAT, EtherNET/IP, OPC | U.A. |
Customers who viewed this product also viewed
Other products of XQ Instruments
View more products of XQ Instruments
About Company Handling This Product
- Singapore