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  2. AUTOMATIC MATCHING BOX for RF Power Supply (Matching Box) ATL-100RA (XQ Instruments)
AUTOMATIC MATCHING BOX for RF Power Supply (Matching Box) ATL-100RA-ATL-100RA
AUTOMATIC MATCHING BOX for RF Power Supply (Matching Box) ATL-100RA-XQ Instruments

AUTOMATIC MATCHING BOX for RF Power Supply (Matching Box) ATL-100RA
XQ Instruments

About This Product

The unit automatically matches the optimum impedance. For example, use plasma etching, reactive etching (R.I.E.), plasma CVD, semiconductor component manufacturing, or other RF plasma-based processes to achieve the optimal impedance. Enables high-speed, highly accurate impedance matching. Converts to a wide range of reactive impedances during plasma processing. This network has a variable capacitor (varicon) to control the load and a variable inductor to control the tuning. Both the capacitor and inductor are controlled simultaneously by a servo motor, allowing instantaneous tuning depending on the plasma situation. This tuning is completely automatic.

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    AUTOMATIC MATCHING BOX for RF Power Supply (Matching Box) ATL-100RA

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1 Models of AUTOMATIC MATCHING BOX for RF Power Supply (Matching Box) ATL-100RA

Image Part Number Price (excluding tax) Weight Maximum reflected power Maximum input power Dimensions (mm) Frequency Cooling Input impedance Capacitor load range minimum Capacitor load range maximum Inductor tuning range minimum Maximum inductor tuning range
AUTOMATIC MATCHING BOX for RF Power Supply (Matching Box) ATL-100RA-Part Number-ATL-100RA

ATL-100RA

Available upon quote

8kg

Less than 2% of input power

500W

200x210x450

300KHz-1MHz

Air cooling

50Ω nominal

≦50pF

≧1800pF

≦45μH

≧115μH

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About Company Handling This Product

XQ Instruments

Company Overview

XQ Instruments develops and manufactures innovative, patented equipment for semi-automated processes. Focus is...

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