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Magnetic bar RAM bar (remote control bar)-RAM bar (remote control bar)
Magnetic bar RAM bar (remote control bar)-XQ Instruments

Magnetic bar RAM bar (remote control bar)
XQ Instruments


About This Product

Achieves uniformity of less than ±0.5% for a board width of approximately 3m. During the sputtering process, optical fibers are used to send signals to command the motor inside the magnet bar to adjust the distance between the magnet and the target with a resolution of 0.5um. There are adjustment points approximately every 30cm to achieve the ultimate distribution. Built-in motor and battery. The adjustment screws for each position are controlled from outside the chamber through optical fibers. As a result, the distance between the magnet and target can be adjusted with an accuracy of ±50um. Also, since it is controlled by optical signals, it can be controlled during the sputtering process. The ultimate distribution adjustment becomes possible.

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    Magnetic bar RAM bar (remote control bar)

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1 Models of Magnetic bar RAM bar (remote control bar)

Image Part Number Price (excluding tax) Adjustment accuracy Magnetic field adjustment screw operating range Nominal distribution Screw position
Magnetic bar RAM bar (remote control bar)-Part Number-RAM bar (remote control bar)

RAM bar (remote control bar)

Available upon quote

±50um

20mm

1% or less at 3m width board

Approximately every 300mm

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Company Overview

XQ Instruments develops and manufactures innovative, patented equipment for semi-automated processes. Focus is...

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