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Magnet bar-TRM bar (standard magnetic field)
Magnet bar-MQRM bar (intermediate magnetic field)
Magnet bar-QRM bar (strong magnetic field)
Magnet bar-XQ Instruments

About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.

・Improved target usage efficiency, up to 85% or more ・Improved sputtering rate, up to 3 times (compared to planer) ・Minimization of particles caused by nodules

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    Magnet bar

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3 Models of Magnet bar

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Adjacent screw allowable height difference Magnetic field adjustment screw Magnetic force Structure Maximum available target Nominal distribution Nominal target usage efficiency Screw position Sputter angle
Magnet bar-Part Number-TRM bar (standard magnetic field)

TRM bar (standard magnetic field)

Available upon quote

Max 3mm

582 Gauss at outer diameter 150mm

3 consecutive

Outer diameter 160mm

±2% or less

70% or more

Approximately every 300mm

±12 degrees

Magnet bar-Part Number-MQRM bar (intermediate magnetic field)

MQRM bar (intermediate magnetic field)

Available upon quote

Max 2mm

764 Gauss at outer diameter 150mm

4 consecutive

Outer diameter 170mm

±2% or less

85% or more

Approximately every 300mm

±15 degrees

Magnet bar-Part Number-QRM bar (strong magnetic field)

QRM bar (strong magnetic field)

Available upon quote

Max 2mm

1,056 gauss at outer diameter 150mm

4 consecutive

Outer diameter 180mm

±2% or less

85% or more

Approximately every 300mm

±21 degrees

Click on the part number for more information about each product

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About Company Handling This Product

Company Overview

XQ Instruments develops and manufactures innovative, patented equipment for semi-automated processes. Focus is...

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