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  2. Special rotary cathode for RF power supply (XQ Instruments)
Special rotary cathode for RF power supply-Rotary RF
Special rotary cathode for RF power supply-XQ Instruments

Special rotary cathode for RF power supply
XQ Instruments

About This Product

A special rotary cathode exclusively for RF power supplies. It is now possible to apply film formation using RF power to cylindrical cathodes, which was previously impossible. This can be expected to reduce the resistance of transparent electrode films such as ITO by sputtering non-conductive targets such as cylindrical ceramic targets and by superimposing DC and RF power sources.

■Features

・Reduction of film formation cost for non-conductive targets such as cylindrical ceramic targets ・Reducing the resistance of transparent conductive films such as ITO by overlapping DC power and RF power ・Special drive mechanism that avoids damage caused by RF power ・Special mechanism to compensate for distribution deterioration due to skin effect peculiar to RF power supply ・Film thickness distribution of ±2% or less with a 650mm long target, comparable to DC power supply Note: The longer the target, the worse the distribution may be.

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    Special rotary cathode for RF power supply

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1 Models of Special rotary cathode for RF power supply

Image Part Number Price (excluding tax)
Special rotary cathode for RF power supply-Part Number-Rotary RF

Rotary RF

Available upon quote

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About Company Handling This Product

XQ Instruments

Company Overview

XQ Instruments develops and manufactures innovative, patented equipment for semi-automated processes. Focus is...

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