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Rotary cathode side-mounted end block-SM (for large boards)
Rotary cathode side-mounted end block-MM (for medium size board)
Rotary cathode side-mounted end block-CM (for small board)
Rotary cathode side-mounted end block-XQ Instruments

Rotary cathode side-mounted end block
XQ Instruments


About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.

・Improved target usage efficiency, up to 85% or more ・Improved sputtering rate, up to 3 times (compared to planer) ・Minimization of particles caused by nodules

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    Rotary cathode side-mounted end block

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3 Models of Rotary cathode side-mounted end block

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Horizontal/vertical mounting Maximum input power Dedicated motor and belt Compatible target length Fully cantilevered Magnet angle
Rotary cathode side-mounted end block-Part Number-SM (for large boards)

SM (for large boards)

Available upon quote

Both possible

200kW at DC/ 80kHz at MFAC

Include

Up to 4,000mm

1,500mm allows up to 140kg

360 degrees freely adjustable

Rotary cathode side-mounted end block-Part Number-MM (for medium size board)

MM (for medium size board)

Available upon quote

Both possible

100kW at DC/ 80kHz at MFAC

Include

Up to 2,500mm

Possible up to 140kg at 1,000mm

360 degrees freely adjustable

Rotary cathode side-mounted end block-Part Number-CM (for small board)

CM (for small board)

Available upon quote

Both possible

20kW at DC/ 80kHz at MFAC

Include

Up to 1,000mm

750mm allows up to 45kg

360 degrees freely adjustable

Click on the part number for more information about each product

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About Company Handling This Product

Company Overview

XQ Instruments develops and manufactures innovative, patented equipment for semi-automated processes. Focus is...

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