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  2. Special rotary cathode for omnidirectional film formation (XQ Instruments)
Special rotary cathode for omnidirectional film formation-IM (Special cathode for 360 degree outer circumference film formation)
Special rotary cathode for omnidirectional film formation-XQ Instruments

Special rotary cathode for omnidirectional film formation
XQ Instruments

About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.

・Improved target usage efficiency, up to 85% or more ・Improved sputtering rate, up to 3 times (compared to planer) ・Minimization of particles caused by nodules

■Features

-Target does not rotate. ・Only the internal magnetic bar rotates 360 degrees continuously. ・Both targets with an inner diameter of 125 mm (standard type) and targets with an inner diameter of 80 mm (small diameter type) can be installed.

■Usage example

・Film formation on the inner wall surface of a cylindrical base material ・Deposition on a substrate placed on a concentric circle at a TTS distance from the center of the target

■Application example

・Tool coating ・Decorative film formation

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    Special rotary cathode for omnidirectional film formation

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1 Models of Special rotary cathode for omnidirectional film formation

Image Part Number Price (excluding tax) Horizontal/vertical mounting Longest loadable target Onboard target Maximum input power Maximum current that can be applied Maximum voltage that can be applied Maximum power that can be input Compatible target length Maintenance Magnet angle
Special rotary cathode for omnidirectional film formation-Part Number-IM (Special cathode for 360 degree outer circumference film formation)

IM (Special cathode for 360 degree outer circumference film formation)

Available upon quote

Both possible

2,000mm

Inner diameter 125mm, inner diameter 80mm, both available

60kW at DC or MFAC

150A

1,500V

60kW (DC or MFAC)

Up to 2,000mm

1 hour/year (for rotating seal replacement)

The target does not rotate, and only the magnetic bar rotates 360 degrees during film deposition.

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About Company Handling This Product

XQ Instruments

Company Overview

XQ Instruments develops and manufactures innovative, patented equipment for semi-automated processes. Focus is...

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