Drop-in cathode for small diameter targets-CC80 (for inner diameter 80mm target)

Drop-in cathode for small diameter targets
XQ Instruments

About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.・Improved target usage efficiency, up to 85% or more
・Improved sputtering rate, up to 3 times (compared to planer)
・Minimization of particles caused by nodules

A drop-in type small rotary cathode equipped with a small cylindrical target with an inner diameter of 80 mm.

■Features- Suitable for replacing flat cathodes and installing in small devices.
・Maximum input power: 20kW DC power supply or MFAC power supply
・Longest loadable target: 1,000mm
・Regular maintenance: 1 hour per year (average)

Model
There is 1 model available for this product.

Product
Drop-in cathode for small diameter targets

Handling Company
XQ Instruments

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1 Models of Drop-in cathode for small diameter targets

Image	Part Number	Price (excluding tax)	Horizontal/vertical mounting	Maximum input power	Dedicated motor and belt	Compatible target length	Magnet angle	End block width	Outboard support block	TTS adjustment
	CC80 (for inner diameter 80mm target)	Available upon quote	Both possible	20kW at DC/MFAC	Include	Up to 1,000mm	Adjustable	122mm	Include	Possible by inserting a spacer

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About Company Handling This Product

XQ Instruments

Company Overview

XQ Instruments develops and manufactures innovative, patented equipment for semi-automated processes. Focus is...

Singapore

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Drop-in cathode for small diameter targets XQ Instruments

About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.

■Features

1 Models of Drop-in cathode for small diameter targets

CC80 (for inner diameter 80mm target)

Other products of XQ Instruments

About Company Handling This Product

Drop-in cathode for small diameter targets
XQ Instruments