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  2. Drop-in swing cathode (XQ Instruments)
Drop-in swing cathode-MCS (MC-Swing for medium size board)
Drop-in swing cathode-XQ Instruments

Drop-in swing cathode
XQ Instruments

About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.

・Improved target usage efficiency, up to 85% or more ・Improved sputtering rate, up to 3 times (compared to planer) ・Minimization of particles caused by nodules This is a new model with a swing function added to the drop-in type MC series where the end block (rotation drive part) enters the vacuum layer. This is an effective tool for situations where there is space within the vacuum layer but not on the atmospheric side, or where you want to place the motor in an L-shape to rotate the target and have a swing function. The main applications are static facing type sputtering equipment and film formation on 3D substrates. In addition, since the angle of incidence at which material is ejected onto the substrate can be changed from the atmospheric side, the rotary cathode makes it easy to verify the correlation between damage to the deposited layer and the angle of incidence. 60kW power can be input.

■Application

・Installation on stationary facing equipment ・Film deposition on 3D base material

  • Product

    Drop-in swing cathode

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1 Models of Drop-in swing cathode

Image Part Number Price (excluding tax) Horizontal/vertical mounting Maximum input power Dedicated motor and belt Compatible target length Magnet angle End block width Outboard support block TTS adjustment
Drop-in swing cathode-Part Number-MCS (MC-Swing for medium size board)

MCS (MC-Swing for medium size board)

Available upon quote

Both possible

100kW at DC/ 80kHz at MFAC

Include

Up to 2,500mm

Can be swung during operation

211mm

Include

Possible by inserting a spacer

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XQ Instruments

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XQ Instruments develops and manufactures innovative, patented equipment for semi-automated processes. Focus is...

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