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Rotary cathode drop-in end block-SC (for large boards)
Rotary cathode drop-in end block-MC-D (for medium-sized boards)
Rotary cathode drop-in end block-TC (for small board)
Rotary cathode drop-in end block-Compact-MC (for cMC medium size board)
Rotary cathode drop-in end block-XQ Instruments

Rotary cathode drop-in end block
XQ Instruments


About This Product

■By switching from a conventional planar cathode to a rotary cathode, you can expect the following benefits.

・Improved target usage efficiency, up to 85% or more ・Improved sputtering rate, up to 3 times (compared to planer) ・Minimization of particles caused by nodules

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    Rotary cathode drop-in end block

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4 Models of Rotary cathode drop-in end block

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Horizontal/vertical mounting Maximum input power Dedicated motor and belt Compatible target length Magnet angle End block width Outboard support block TTS adjustment
Rotary cathode drop-in end block-Part Number-SC (for large boards)

SC (for large boards)

Available upon quote

Both possible

200kW at DC/ 80kHz at MFAC

Include

Up to 4,000mm

Adjustable in 15 degree increments

204mm

Include

Possible by inserting a spacer

Rotary cathode drop-in end block-Part Number-MC-D (for medium-sized boards)

MC-D (for medium-sized boards)

Available upon quote

Both possible

100kW at DC/ 80kHz at MFAC

Include

Up to 2,500mm

360 degree stepless adjustment

160mm

Include

Possible by inserting a spacer

Rotary cathode drop-in end block-Part Number-TC (for small board)

TC (for small board)

Available upon quote

Both possible

40kW at DC/ 80kHz at MFAC

Include

Up to 1,500mm

360 degree stepless adjustment

58mm

Double-sided type

Possible by inserting a spacer

Rotary cathode drop-in end block-Part Number-Compact-MC (for cMC medium size board)

Compact-MC (for cMC medium size board)

Available upon quote

Both possible

100kW at DC/ 80kHz at MFAC

Include

Up to 2,500mm

360 degree adjustable in 10 degree increments

125mm

Include

Possible by inserting a spacer

Click on the part number for more information about each product

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About Company Handling This Product

Company Overview

XQ Instruments develops and manufactures innovative, patented equipment for semi-automated processes. Focus is...

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