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  4. Spin coater (Pickling Co., Ltd.)
Spin coater-Spin coater
Spin coater-Pickling Co., Ltd.

Spin coater
Pickling Co., Ltd.

About This Product

■Features

・Resist coating for 2 inch to 6 inch wafers ・Film thickness 0.8μm to 1μm (reference value) ・Spin rotation speed 50rpm to 6,000rpm (arbitrary setting) ・Rotary baking oven 50℃～200℃±1% ・Parallel processing in 2-track configuration ・Equipped with double arm transfer robot (equipped with 2 robots) ・Processing capacity approximately 80 sheets/h ・Customization possible

  • Product

    Spin coater

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1 Models of Spin coater

Image Part Number Price (excluding tax)
Spin coater-Part Number-Spin coater

Spin coater

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Pickling Co., Ltd.

  • Japan

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