Lamp annealing equipment (high speed heat treatment equipment)
Pickling Co., Ltd.
About This Product
■Features
・We have a lineup of three types of systems according to the wafer size. (4 inch/6 inch/8 inch)
・Supports closed-loop high-speed heat treatment with a maximum heating rate of 200°C/sec and a maximum temperature of 1,250°C.
- Cutting-edge temperature control algorithm enables heat treatment without overshoot or undershoot.
・Excellent wafer-to-wafer temperature profile reproducibility.
・High-precision temperature measurement using a wide range pyrometer (non-contact high temperature thermometer) (optional)
- Up to 4 MFCs (mass flow meters) can be installed for various process gases.
・We offer various susceptors for glass substrates and compound semiconductors.
・With advanced recipe settings and calibration functions, it can be used not only for R&D but also for production purposes.
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Product
Lamp annealing equipment (high speed heat treatment equipment)
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Handling Company
Pickling Co., Ltd.
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Categories
1 Models of Lamp annealing equipment (high speed heat treatment equipment)
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Lamp annealing equipment (high speed heat treatment equipment) |
Available upon quote |
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About Company Handling This Product
- Japan