Sapphire Capacitance Diaphragm Gauge Sapphire Diaphragm Vacuum Gauge
Seho Co., Ltd.
About This Product
■Features
・Sapphire is used for the pressure receiving part. This is a diaphragm vacuum gauge that has improved deposit resistance performance by applying MEMS processing technology.
・Reduced downtime by improving anti-depot performance
・Can be used up to 250℃, compatible with high temperature process gases
・Reducing footprint through miniaturization
■Summary
The sapphire diaphragm vacuum gauge type V8 has improved anti-deposit performance with a sensor that uses MEMS processing technology. By using single-crystal sapphire, which has high corrosion resistance, high heat resistance, and excellent mechanical properties, for the pressure receiving part, the V8S has a maximum operating temperature of 250°C.
■Reduced downtime due to improved anti-depot performance
By applying MEMS processing technology, the shift amount has been improved to 1/10.
■Stress balance structure
By adding thickness to the outer periphery of the pressure sensitive part and offsetting the stress balance between the outer periphery and the center, the pressure sensitive part becomes less likely to deform and zero point shift is reduced.
■Concave/concave sensor
By processing the surface of the pressure sensitive part to be uneven, the attached film is divided and the stress effect of deposits is reduced.
■Can be used up to 250℃, compatible with high temperature process gases
The V8S has achieved a maximum operating temperature of 250°C by separating the circuit board and sensor parts and reviewing the materials used.
■Reducing footprint through miniaturization
The space efficiency of built-in parts has been improved, and the volume has been reduced by 40%. (Compared to our conventional product).
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Product
Sapphire Capacitance Diaphragm Gauge Sapphire Diaphragm Vacuum Gauge
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Handling Company
Seho Co., Ltd.
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Categories
2 Models of Sapphire Capacitance Diaphragm Gauge Sapphire Diaphragm Vacuum Gauge
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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V8C |
Available upon quote |
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V8S |
Available upon quote |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan