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Fully automatic face-up type wafer plating equipment TEAM-FU-TEAM-FU : Automated Face-up Plating Tool
Fully automatic face-up type wafer plating equipment TEAM-FU-Toset Co., Ltd.

Fully automatic face-up type wafer plating equipment TEAM-FU
Toset Co., Ltd.

🚀 Aerospace Industry Use 💻 Electronics & Electrical Use

About This Product

■We have a track record of delivering magnetic film plating equipment to all companies in the HDD industry.

The face-up method has been used for 30 years in the magnetic thin film formation process for HDD magnetic heads. Based on the unique technology cultivated in this field, in addition to magnetic thin film formation processes such as magnetic sensors, small electronic components installed in mobile terminal devices such as smartphones and tablets, electrodes and wiring formation in the semiconductor and MEMS fields. It is widely used in. Because of its excellent in-plane film thickness uniformity, it is also used in advanced packaging such as TSV and RDL, as well as in the electrode and wiring formation processes of three-dimensional integrated devices.

■Features of face-up plating equipment

●Good film thickness uniformity within the wafer surface ●Excellent alloy composition stability ●Can be used with highly corrosive plating films ●The number of tanks can be increased or decreased depending on the process and throughput. ●Easy to transport cassettes to cassettes

■Plating type

Magnetic materials, copper, nickel, gold, etc.

■Target work

4, 6, 8, 12 inch size silicone, compound, glass, etc.

■Applications

●Magnetic thin film for HDD magnetic heads and magnetic sensors (NiFe, FeCo, NiFeCo) ●Electrode and wiring formation processes such as TSV, RDL, and micro bumps in the advanced packaging field

  • Product

    Fully automatic face-up type wafer plating equipment TEAM-FU
  • Usage Scenarios

    Aerospace Industry Use / Electronics & Electrical Use

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1 Models of Fully automatic face-up type wafer plating equipment TEAM-FU

Image Part Number Price (excluding tax) Method Panel size Wafer size Plating material
Fully automatic face-up type wafer plating equipment TEAM-FU-Part Number-TEAM-FU : Automated Face-up Plating Tool

TEAM-FU : Automated Face-up Plating Tool

Available upon quote

Face up type

Max. 300mm

Magnetic materials, TSV, Cu filling, Cu, Au, Ni, etc.

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