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  2. Gas distributor (MPS Co., Ltd.)
Gas distributor-Gas distributor
Gas distributor-MPS Co., Ltd.

Gas distributor
MPS Co., Ltd.

About This Product

■Summary

A gas nozzle that supplies plasma working gas (argon) and reaction gas for large sputtering equipment. The working and reacting gases mix in the channels. The gas flow paths are of equal length to prevent gas concentration distribution. Gas distribution can also be adjusted by replacing the internal nozzle.

  • Product

    Gas distributor

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1 Models of Gas distributor

Image Part Number Price (excluding tax)
Gas distributor-Part Number-Gas distributor

Gas distributor

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About Company Handling This Product

MPS Co., Ltd.

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