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HyperLith™ Simulator-HyperLith™ Simulator
HyperLith™ Simulator-Intersoft Co., Ltd.

HyperLith™ Simulator
Intersoft Co., Ltd.


About This Product

Features

■Lithography simulator HyperLith™

・Easy-to-use lithography simulator, HyperLith ・Easy to use, flexible and powerful - Get results quickly with preset templates ・Speed ​​up with hardware accelerated processing, parallel processing, and distributed processing ・Supports 32/64 bit Windows and Linux ・Mask pattern templates, resist model customization, and easy pattern creation by customers ・Specialized for intuitive GUI input and lithography simulation using steppers - LiveView GUI allows you to quickly view approximate simulation results for normal cases ・Supports DUV, immersion, EUV, exact solution/scalar calculation, polarization, aberration, and resist technology ・SEM simulation possible (optional)

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    HyperLith™ Simulator

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