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  2. EM-Suite Lithography Simulator (Intersoft Co., Ltd.)
EM-Suite Lithography Simulator-EM-Suite
EM-Suite Lithography Simulator-Intersoft Co., Ltd.

EM-Suite Lithography Simulator
Intersoft Co., Ltd.

About This Product

Features

■The EM-Suite software package provides various simulations such as lithography and inspection equipment.

・Simulate scattering on a photomask using 3D rigorous electromagnetic simulation ・Image calculation in the atmosphere, liquid immersion, laminated thin film, vector image calculation ・3D exposure and baking (diffusion/reaction formula) Calculation of chemically amplified resist development

■Main application examples

・Immersion lithography ・Shibuya-Levenson type phase shift mask ・Halftone phase shift mask ・Chromeless PSM (CPL) ・Binary mask ・EUV mask ・Defects in EUV laminated mirrors ・Wafer inspection ・Mask inspection ・Scatterometry (Light wave scattering measurement 2D & 3D) ・Chrome (binary) mask on glass ・Source optimization ・Mask optimization ・Grating ・Pinhole ・Convergent beam ・Defect analysis ・Others

  • Product

    EM-Suite Lithography Simulator

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1 Models of EM-Suite Lithography Simulator

Image Part Number Price (excluding tax)
EM-Suite Lithography Simulator-Part Number-EM-Suite

EM-Suite

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About Company Handling This Product

Intersoft Co., Ltd.

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