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Vibration isolation table Active vibration isolation table (high load type)-FVH-2400F/P
Vibration isolation table Active vibration isolation table (high load type)-Fujikura Composite Co., Ltd.

Vibration isolation table Active vibration isolation table (high load type)
Fujikura Composite Co., Ltd.

Fujikura Composite Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

18.5hours

Relatively Fast Response


About This Product

■Active vibration isolation table (high load type) Overview

This is a high-load type that uses our bellows type air spring. Achieves both high vibration isolation characteristics and a thinner profile.

■Excellent responsiveness

Thanks to the highly responsive thin film bellows and large flow rate actuator, stroke fluctuations can be kept to a minimum even when a moving stage with a large load moves on the device.

■Thin shape

Since it uses a thin bellows method, it has a thin vibration isolator structure. FVH-2400F has achieved a height of 169mm (in neutral). Therefore, it is possible to keep the center of gravity of the installed equipment low.

■Applications

・Reduction of floor vibration of precision equipment ・Semiconductor manufacturing equipment, semiconductor inspection equipment, liquid crystal exposure equipment, precision measurement equipment, precision processing machines, other precision equipment, etc.

■About bellows air springs

Based on diaphragm manufacturing technology, we have developed a bellows-type air spring that is extremely thin but highly durable, and has adopted it in this device.

  • Product

    Vibration isolation table Active vibration isolation table (high load type)

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1 Models of Vibration isolation table Active vibration isolation table (high load type)

Image Part Number Price (excluding tax) Vertical (Z) direction control method Leg configuration legs Power consumption VA Horizontal (X/Y) direction control method Loaded mass range Kg Natural frequency Hz (passive calculation value) Control degree of freedom Supply pressure (flow rate) MPa (L/min (ANR) ) Stroke mm
Vibration isolation table Active vibration isolation table (high load type)-Part Number-FVH-2400F/P

FVH-2400F/P

Available upon quote

Position/attenuation

4

1,520

Position/attenuation

20,000~30,000

Vertical direction 3.7~5.5 / Vertical direction 3.2~5.0

6 degrees of freedom (X,Y,Z,θX,θY,θZ)

0.6~1.0 (170 or more)

Vertical direction 1~7/Horizontal direction ±2

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About Company Handling This Product

Response Rate

100.0%


Response Time

18.5hrs


Company Review

5.0
  • Japan

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