Vibration isolation table Active vibration isolation table (high load type)
Fujikura Composite Co., Ltd.
About This Product
■Active vibration isolation table (high load type) Overview
This is a high-load type that uses our bellows type air spring. Achieves both high vibration isolation characteristics and a thinner profile.
■Excellent responsiveness
Thanks to the highly responsive thin film bellows and large flow rate actuator, stroke fluctuations can be kept to a minimum even when a moving stage with a large load moves on the device.
■Thin shape
Since it uses a thin bellows method, it has a thin vibration isolator structure. FVH-2400F has achieved a height of 169mm (in neutral). Therefore, it is possible to keep the center of gravity of the installed equipment low.
■Applications
・Reduction of floor vibration of precision equipment
・Semiconductor manufacturing equipment, semiconductor inspection equipment, liquid crystal exposure equipment, precision measurement equipment, precision processing machines, other precision equipment, etc.
■About bellows air springs
Based on diaphragm manufacturing technology, we have developed a bellows-type air spring that is extremely thin but highly durable, and has adopted it in this device.
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Product
Vibration isolation table Active vibration isolation table (high load type)
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Handling Company
Fujikura Composite Co., Ltd.
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Categories
1 Models of Vibration isolation table Active vibration isolation table (high load type)
| Product Image | Part Number | Price (excluding tax) | Control degree of freedom | Horizontal (X/Y) direction control method | Leg configuration legs | Loaded mass range Kg | Natural frequency Hz (passive calculation value) | Power consumption VA | Stroke mm | Supply pressure (flow rate) MPa (L/min (ANR) ) | Vertical (Z) direction control method |
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FVH-2400F/P |
Available upon quote | 6 degrees of freedom (X,Y,Z,θX,θY,θZ) | Position/attenuation | 4 | 20,000~30,000 | Vertical direction 3.7~5.5 / Vertical direction 3.2~5.0 | 1,520 | Vertical direction 1~7/Horizontal direction ±2 | 0.6~1.0 (170 or more) | Position/attenuation |
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