Vibration isolation table Bellows type passive vibration isolation table
Fujikura Composite Co., Ltd.
About This Product
■Bellows type passive vibration isolation table Overview
A passive vibration isolation table that uses our bellows type air spring. Achieves both high vibration isolation characteristics and a thinner profile.
■High vibration isolation characteristics, space saving
Based on diaphragm manufacturing technology, we have developed a bellows-type air spring that is extremely thin but highly durable. By applying this bellows to a vibration isolation table, it has high vibration isolation characteristics.
Instead, we have achieved high responsiveness due to the smaller body of the vibration isolation table and its thin walls.
■Exclusive design
We can also provide special designs according to customer requests, such as external tanks for low natural frequency adjustment and activation of passive mounts.
■Applications
・Reduction of floor vibration of precision equipment
・Semiconductor manufacturing equipment, semiconductor inspection equipment, liquid crystal exposure equipment, precision measurement equipment, precision processing machines, other precision equipment, etc.
■About bellows air springs
Based on diaphragm manufacturing technology, we have developed a bellows-type air spring that is extremely thin but highly durable, and has adopted it in this device.
■Characteristics
Low vibration isolation characteristics in the vertical and horizontal directions It has a low and stable natural frequency in both the vertical and horizontal directions, and exhibits high vibration isolation characteristics in the high frequency range.
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Product
Vibration isolation table Bellows type passive vibration isolation table
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Handling Company
Fujikura Composite Co., Ltd.
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Categories
3 Models of Vibration isolation table Bellows type passive vibration isolation table
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Leg configuration legs | Loaded mass range Kg | Natural frequency Hz | Stroke mm |
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FPM-100 |
Available upon quote | 3~4 | 500~1,500 | Vertical direction 3.7~5.5 / Vertical direction 2.7~5.0 | Vertical direction ±3 / Vertical direction ±2 |
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FPM-200 |
Available upon quote | 3~4 | 2,000~5,000 | Vertical direction 3.7~5.5 / Vertical direction 2.7~5.0 | Vertical direction ±3 / Vertical direction ±2 |
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FPM-300 |
Available upon quote | 3~4 | 5,000~20,000 | Vertical direction 3.7~5.5 / Vertical direction 2.7~5.0 | Vertical direction ±3 / Vertical direction ±2 |
Click on the part number for more information about each product
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