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  3. Vibration Isolators
  4. Vibration isolation table Bellows type passive vibration isolation table (Fujikura Composite Co., Ltd.)
Vibration isolation table Bellows type passive vibration isolation table-FPM-100
Vibration isolation table Bellows type passive vibration isolation table-Fujikura Composite Co., Ltd.

Vibration isolation table Bellows type passive vibration isolation table
Fujikura Composite Co., Ltd.

About This Product

■Bellows type passive vibration isolation table Overview

A passive vibration isolation table that uses our bellows type air spring. Achieves both high vibration isolation characteristics and a thinner profile.

■High vibration isolation characteristics, space saving

Based on diaphragm manufacturing technology, we have developed a bellows-type air spring that is extremely thin but highly durable. By applying this bellows to a vibration isolation table, it has high vibration isolation characteristics. Instead, we have achieved high responsiveness due to the smaller body of the vibration isolation table and its thin walls.

■Exclusive design

We can also provide special designs according to customer requests, such as external tanks for low natural frequency adjustment and activation of passive mounts.

■Applications

・Reduction of floor vibration of precision equipment ・Semiconductor manufacturing equipment, semiconductor inspection equipment, liquid crystal exposure equipment, precision measurement equipment, precision processing machines, other precision equipment, etc.

■About bellows air springs

Based on diaphragm manufacturing technology, we have developed a bellows-type air spring that is extremely thin but highly durable, and has adopted it in this device.

■Characteristics

Low vibration isolation characteristics in the vertical and horizontal directions It has a low and stable natural frequency in both the vertical and horizontal directions, and exhibits high vibration isolation characteristics in the high frequency range.

  • Product

    Vibration isolation table Bellows type passive vibration isolation table

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3 Models of Vibration isolation table Bellows type passive vibration isolation table

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Leg configuration legs Loaded mass range Kg Natural frequency Hz Stroke mm
Vibration isolation table Bellows type passive vibration isolation table-Part Number-FPM-100

FPM-100

Available upon quote

3~4

500~1,500

Vertical direction 3.7~5.5 / Vertical direction 2.7~5.0

Vertical direction ±3 / Vertical direction ±2

Vibration isolation table Bellows type passive vibration isolation table-Part Number-FPM-200

FPM-200

Available upon quote

3~4

2,000~5,000

Vertical direction 3.7~5.5 / Vertical direction 2.7~5.0

Vertical direction ±3 / Vertical direction ±2

Vibration isolation table Bellows type passive vibration isolation table-Part Number-FPM-300

FPM-300

Available upon quote

3~4

5,000~20,000

Vertical direction 3.7~5.5 / Vertical direction 2.7~5.0

Vertical direction ±3 / Vertical direction ±2

Click on the part number for more information about each product

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About Company Handling This Product

Fujikura Composite Co., Ltd.

  • Japan

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Vibration Isolators　Fujikura Composite Co., Ltd.
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