Visualize thin films Imaging ellipsometer Accurion EP4
Park Systems Japan Co., Ltd.
About This Product
Imaging Ellipsometer EP4 is a product that combines ellipsometry and microscopy.
EP4 can evaluate optical properties such as thin film thickness and refractive index with the sensitivity of ellipsometry for minute structures of about 1 µm. With conventional ellipsometers, measurements must be taken one point at a time, and multiple areas cannot be measured simultaneously, and the positional resolution depends on the spot size. On the other hand, EP4 can obtain ellipsometry images with microscopic resolution, making it possible to measure all structures within the field of view at once with microscopic resolution. It is also possible to record a 3D map of the thickness and refractive index distribution with a single measurement.
By using a microscope optical system and a polarizing optical system, it is possible to visualize ellipsometric-enhanced contrast, and it is possible to confirm slight changes in the refractive index or thickness of a thin film using the camera's live view. This allows you to easily identify regions of interest for thickness (0.1 nm to 10 μm) and refractive index values in the preparation stage for ellipsometry measurements.
By combining with options such as AFM, QCM-D, reflectometry, and Raman, it is possible to measure the same area as other measurement techniques. Furthermore, by combining specific accessories, it is possible to perform measurements that control the measurement environment and temperature changes.
■High-performance modeling software
Modular EP4 software allows data analysis to be performed simultaneously with instrument control. With EP4 control, you can control the measuring device, measure samples, visualize and select the area to be measured in live view, and even place multiple samples and automatically perform multiple measurements.
DataStudio can process the measured data and obtain microscopic details of the sample through histogram analysis and line profiles of ellipsometry images.
EP4 Model allows you to intuitively create an optical model of your sample. It is possible to create and analyze a variety of sample structures, from simple to complex optical models, and obtain information about the thickness and refractive index of thin films on the sample. Additionally, it is also possible to obtain physical parameters such as bandgap and volume fraction of the mixed material layer.
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Product
Visualize thin films Imaging ellipsometer Accurion EP4
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Handling Company
Park Systems Japan Co., Ltd.
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1 Models of Visualize thin films Imaging ellipsometer Accurion EP4
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Accurion EP4 |
Available upon quote |
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