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  2. Vacuum environment scanning suitable for failure analysis applications Park NX-Hivac (Park Systems Japan Co., Ltd.)
Vacuum environment scanning suitable for failure analysis applications Park NX-Hivac-NX-Hivac
Vacuum environment scanning suitable for failure analysis applications Park NX-Hivac-Park Systems Japan Co., Ltd.

Vacuum environment scanning suitable for failure analysis applications Park NX-Hivac
Park Systems Japan Co., Ltd.

Park Systems Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

26.4hours

Relatively Fast Response

About This Product

■NX-Hivac automatic vacuum control

The pumping and evacuation process to the optimum vacuum condition is logically and visually controlled with just one button operation. Each process can be visually monitored by changing colors and diagrams, so you don't have to worry about vacuum operation steps after one-button operation.

■StepScan automatic measurement using motorized stage

Program your device quickly and easily. Scanning can be performed in just 5 steps: scan, lift the cantilever, move the motorized stage to the coordinates set by the user, approach, and repeat.

■Electric laser alignment

Automatic measurement routines can continue without user input. Using Park's state-of-the-art pre-aligned cantilever holder, the laser beam is focused onto the replaced cantilever. Then the laser spot is optimized along the X and Y axis directions by motorized position knobs.

■Closed loop XY scanner and Z scanner

The closed-loop XY scanner for sample scanning and the closed-loop Z scanner for probe scanning are separated, allowing very accurate scanning. The flat and orthogonal XY scanner with low bowing error allows flat motion of less than 1 nm over the entire scan range. The NX-Hivac type is equipped with a Z scanner with a 15μm scan range and 0.5% non-linearity. This allows users to perform accurate 2D and 3D measurements without the need for software image processing.

■Low noise XYZ position sensor

The low-noise XY scanner delivers a minimum error of 0.15% on both-way scans, while the Park AFM is equipped with an industry-leading low-noise Z detector for accurate sample shape measurements.

■24-bit digital electronics

NX Series controllers help you minimize unnecessary time and maximize accuracy. It is a fully digitally controlled 24-bit high-speed device that enables a wide range of measurement modes including non-contact mode. The low-noise design and high-speed processing mechanism enable high-resolution voltage and current measurements as well as nanoscale imaging. The digital processing capabilities of the built-in electronics make it easy to analyze measurement and image data.

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    Vacuum environment scanning suitable for failure analysis applications Park NX-Hivac

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1 Models of Vacuum environment scanning suitable for failure analysis applications Park NX-Hivac

Image Part Number Price (excluding tax) Electric Z stage drive distance Field of view Vacuum speed Vacuum level External vacuum (including granite & pump) Internal vacuum chamber Focus stage drive range Sample weight Sample size Z Scanner Height (Height) Noise Level Z scanner scan range XY stage drive range XY scanner scan range CCD pixel
Vacuum environment scanning suitable for failure analysis applications Park NX-Hivac-Part Number-NX-Hivac

NX-Hivac

Available upon quote

24mm (electric)

840µm x 630µm (when using 10x objective lens)

10-5torr/within 5 minutes

1x10-5torr or less

800mmx950mmx1,240mm

300mmx420mmx320mm

11mm (electric)

<500g

Open space up to 50mmx50mm, thickness up to 20mm

30pm, 0.5kHz bandwidth/rms (typical)

15μm (30μm as option)

22µm×22µm (electric)

50µm×50µm (100µm×100µm as option)

5M pixels

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About Company Handling This Product

Park Systems Japan Co., Ltd.

Response Rate

100.0%

Response Time

26.4hrs

  • Japan

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