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  2. Ultrapure water antistatic device MEGCON PRCⅡ+/FRCⅡ+ series rack type (NGK FILTECH Co., Ltd.)
Ultrapure water antistatic device MEGCON PRCⅡ+/FRCⅡ+ series rack type-1000ACD
Ultrapure water antistatic device MEGCON PRCⅡ+/FRCⅡ+ series rack type-NGK FILTECH Co., Ltd.

Ultrapure water antistatic device MEGCON PRCⅡ+/FRCⅡ+ series rack type
NGK FILTECH Co., Ltd.

NGK FILTECH Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

49.2hours

About This Product

In order to solve problems caused by static electricity in precision cleaning of semiconductor parts, we provide functional water with adjusted resistivity of ultrapure water.

■Summary

Normal precision cleaning uses ultrapure water that contains almost no ionic components, which tends to generate static electricity, which can cause product defects due to the following problems. ・Circuit damage due to static electricity (=electrostatic damage) ・Re-adhesion of fine particles due to surface charge and static electricity on the object to be cleaned The ultrapure water antistatic device MEGCON creates functional water with adjusted resistivity of ultrapure water, suppresses the generation of static electricity caused by ultrapure water, and contributes to reducing product defects (improving yield).

■Applications

・Cleaning in the dicing process ・High pressure jet cleaning ・Scrubber cleaning ・Cleaning the LCD panel ・Cleaning of photomask and reticle, etc.

■Features

・Less risk of particulate contamination and low carbon dioxide consumption ・Feedback control allows quick control to the target resistivity value in response to flow rate fluctuations. ・Low pressure loss of ultrapure water when entering and exiting the device ・Lineup of CE marking series that can be exported to Europe ・Supports large flow rate (large flow function is available in the lineup)

■Principle

Carbon dioxide gas is dissolved in ultrapure water through a membrane.

■Dimensions

480W×355D×200H mm

■Weight

15kg

■Wetted parts

Cell (carbon dioxide gas introduction part): PP

■Material

Piping: PVC braided hose

■Ultra pure water connection size

Hose nozzle (for IDφ19 braided hose)

■Utility

・Ultra pure water Pressure: Normal use 0.35MPa or less (maximum 0.45MPa or more) / Temperature: 5 to 35℃ / Water quality: 10MΩ・cm or more ・CO2 gas Pressure: 0.1-0.2MPa/Temperature: 5-35℃/Purity: 99.5% or more ・Power supply AC100-240V (50/60Hz)

■Dry air (for membrane drying)

・PRC series Built-in air pump, so no need ・FRC series 0.1～0.2MPa

■Standard accessories

·operating instructions ・Inspection report ・100-120V: Power cord 2.8m (with plug) ・200-240V: No cord (please connect to the terminal block)

  • Product

    Ultrapure water antistatic device MEGCON PRCⅡ+/FRCⅡ+ series rack type

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4 Models of Ultrapure water antistatic device MEGCON PRCⅡ+/FRCⅡ+ series rack type

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Maximum flow rate (L/h) Control range (MΩ・cm)
Ultrapure water antistatic device MEGCON PRCⅡ+/FRCⅡ+ series rack type-Part Number-1000ACD

1000ACD

Available upon quote

1,000

0.2~2.0

Ultrapure water antistatic device MEGCON PRCⅡ+/FRCⅡ+ series rack type-Part Number-1200ACD

1200ACD

Available upon quote

1,000

0.1~0.5

Ultrapure water antistatic device MEGCON PRCⅡ+/FRCⅡ+ series rack type-Part Number-2000ACD

2000ACD

Available upon quote

2,000

0.2~2.0

Ultrapure water antistatic device MEGCON PRCⅡ+/FRCⅡ+ series rack type-Part Number-1220ACD

1220ACD

Available upon quote

2,000

0.15~1.0

Click on the part number for more information about each product

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About Company Handling This Product

NGK FILTECH Co., Ltd.

Response Rate

100.0%

Response Time

49.2hrs

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