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  2. Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type (NGK FILTECH Co., Ltd.)
Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type-1000ACD
Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type-NGK FILTECH Co., Ltd.

Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type
NGK FILTECH Co., Ltd.

About This Product

In order to solve problems caused by static electricity in precision cleaning of semiconductor parts, we provide functional water with adjusted resistivity of ultrapure water.

■Summary

Normal precision cleaning uses ultrapure water that contains almost no ionic components, which tends to generate static electricity, which can cause product defects due to the following problems. ・Circuit damage due to static electricity (=electrostatic damage) ・Re-adhesion of fine particles due to surface charge and static electricity on the object to be cleaned The ultrapure water antistatic device MEGCON creates functional water with adjusted resistivity of ultrapure water, suppresses the generation of static electricity caused by ultrapure water, and contributes to reducing product defects (improving yield).

■Applications

・Cleaning in the dicing process ・High pressure jet cleaning ・Scrubber cleaning ・Cleaning the LCD panel ・Cleaning of photomask and reticle, etc.

■Features

・Less risk of particulate contamination and low carbon dioxide consumption ・Feedback control allows quick control to the target resistivity value in response to flow rate fluctuations. ・Low pressure loss of ultrapure water when entering and exiting the device ・Lineup of CE marking series that can be exported to Europe ・Supports large flow rate (large flow function is available in the lineup)

■Principle

Carbon dioxide gas is dissolved in ultrapure water through a membrane.

■Wetted parts

Cell (carbon dioxide gas introduction part): PP

■Utility

・Ultra pure water Pressure: Normal use 0.35MPa or less (maximum 0.45MPa or more) / Temperature: 5 to 35℃ / Water quality: 10MΩ・cm or more ・CO2 gas Pressure: 0.1-0.2MPa/Temperature: 5-35℃/Purity: 99.5% or more ・Dry air (for membrane drying) Not required as air pump is built-in ・Power supply AC100-240V (50/60Hz)

■Standard accessories

·operating instructions ・Inspection report ・100-120V: Power cord 2.8m (with plug) ・200-240V: Power cord 5m (no plug) -S type comes with two-color light with buzzer + leveler and casters.

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    Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type

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10 Models of Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Weight Ultrapure water connection size Material Maximum flow rate Size Control area
Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type-Part Number-1000ACD

1000ACD

Available upon quote

65kg

Rc1/2

Piping: PVC braided hose

1,000

520W×400D×1,150H mm

0.2~2.0

Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type-Part Number-1000ACD-S

1000ACD-S

Available upon quote

66kg

Rc1/2

Piping: PVC braided hose

1,000

520W×400D×1,415H mm

0.2~2.0

Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type-Part Number-1200ACD

1200ACD

Available upon quote

65kg

Rc1/2

Piping: PVC braided hose

1,000

520W×400D×1,150H mm

0.1~0.5

Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type-Part Number-1200ACD-S

1200ACD-S

Available upon quote

66kg

Rc1/2

Piping: PVC braided hose

1,000

520W×400D×1,415H mm

0.1~0.5

Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type-Part Number-2000ACD

2000ACD

Available upon quote

65kg

Rc3/4

Piping: PVC braided hose

2,000

520W×400D×1,150H mm

0.2~2.0

Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type-Part Number-2000ACD-S

2000ACD-S

Available upon quote

66kg

Rc3/4

Piping: PVC braided hose

2,000

520W×400D×1,415H mm

0.2~2.0

Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type-Part Number-1220ACD

1220ACD

Available upon quote

65kg

Rc3/4

Piping: PVC braided hose

2,000

520W×400D×1,150H mm

0.15~1.0

Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type-Part Number-1220ACD-S

1220ACD-S

Available upon quote

66kg

Rc3/4

Piping: PVC braided hose

2,000

520W×400D×1,415H mm

0.15~1.0

Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type-Part Number-2040ACD

2040ACD

Available upon quote

70kg

Rc1 1/4

Piping:PVC

4,000

520W×400D×1,150H mm

0.2~2.0

Ultrapure water antistatic device MEGCON PRCⅡ+ series cabinet type-Part Number-2040ACD-S

2040ACD-S

Available upon quote

71kg

Rc1 1/4

Piping:PVC

4,000

520W×400D×1,415H mm

0.2~2.0

Click on the part number for more information about each product

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About Company Handling This Product

NGK FILTECH Co., Ltd.

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