This product is registered by Nano Soltech Co., Ltd..
About This Product
This is a foreign particle inspection device that is compatible with 4-12 inch non-patterned wafers, and is suitable for particle management in various equipment during the manufacturing process of power logic devices. Unique optical system technology dramatically improves sensitivity with metal films compared to comparable conventional models, and it also features a large 24-inch monitor. It has been designed with excellent operability in mind, including touch panel operation.
■Features
・Reliable domestic design and manufacturing
・Compatible with 4 inch, 5 inch, 6 inch, 8 inch, 12 inch Wafer
・SiC wafer compatible
・High operability on large monitors
・Equipped with the latest optical system
・Maximum sensitivity 60nm (Bare Si)
・Highly sensitive inspection even on metal films
・As an alternative to SFS6420
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