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  4. 3BM retainer ring (Taisei Co., Ltd.)
3BM retainer ring-3BM retainer ring
3BM retainer ring-Taisei Co., Ltd.

3BM retainer ring
Taisei Co., Ltd.

About This Product

■Advantages of using 3BM®︎ retainer ring

3BM retainer ring outperforms PPS in 4 categories. 1.Abrasion resistance 2.Scratch amount 3.Environmental load 4.Cost (material)

■Features

- PAD wear performance is more than 3 times higher. - Scratches due to slurry aggregation are reduced to less than 1/4 in the oxide film process, and about half in the W process. ・Used 3BM retainer rings will be collected free of charge upon request. Since it is made of PET resin, it can be recycled. ・The cost of 3BM, which is a PET resin, is 1/9th of that of PPS at the material level.

■Introduction of 3BM®︎ retainer ring

Normally, retainer rings cannot be recycled because their main component is PPS resin (polyphenylene sulfide), which is a super engineering plastic, but the newly developed 3BM® retainer ring uses recyclable PET resin. Retainer rings are consumable items. During the CMP process, it is polished along with the wafer and needs to be replaced after a few millimeters of polishing. Retainer rings are an essential part of the CMP process and will never go away. According to our research, 500 tons of PPS retainer rings are disposed of in landfills around the world every year. By changing from PPS resin to PET resin, the recycling rate increases from 0% to 88%. Semiconductor factories also use various other substances that cause environmental destruction. Although we cannot solve all of these problems, we will try to be a little more considerate of the environment. 3BMTM overcomes the weaknesses of conventional PET and was developed specifically for CMP retainer rings. As a result, we were able to significantly reduce the occurrence of scratches.

■Excellent wear resistance

Approximately 3 times that of PPS

■High dimensional stability

Low water absorption, low coefficient of linear expansion, and little distortion.

■High strength and rigidity

It can withstand high loads and wear, making it suitable for precision mechanical parts.

■Does not elute impurities

Chemical stability and improved manufacturing method →Cleanliness meets US FDA standards (food safety).

  • Product

    3BM retainer ring

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1 Models of 3BM retainer ring

Image Part Number Price (excluding tax)
3BM retainer ring-Part Number-3BM retainer ring

3BM retainer ring

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About Company Handling This Product

Taisei Co., Ltd.

  • Japan

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