Surface emitting porous chuck-Surface emitting porous chuck

Surface emitting porous chuck
Yoshioka Seiko Co., Ltd.

About This Product

■SummaryA porous chuck with a built-in light source that adds light emitting function. It emits light from all over the area instead of from a point, contributing to improved accuracy in internal pattern inspection of multilayer wafers and edge inspection of inspection workpieces.

■What is porous chuck?This is a product that uses porous material and negative pressure from suction to suction and fix thin objects onto a flat surface with high precision. Many porous chucks are incorporated into various semiconductor manufacturing equipment and inspection equipment, including dicing saws. In addition to silicon wafers, in recent years it has been able to suction and fix all kinds of thin workpieces such as films, flexible printed circuit boards (FPC), and paper.

■What is porous?Generally speaking, it refers to a material that has countless continuous fine pores, like a sponge. Our porous material is made by baking fine powder such as alumina or stainless steel with air permeability, and can be manufactured with roughness (pore diameter) depending on the application.

■Structure of porous chuckA porous chuck consists of a porous material and a body into which the porous material is inserted. We listen to the customer's requests and uses and propose the optimal specifications for each material and shape.

■Differences from conventional hole adsorptionVacuum chucks for drilling holes and grooves deform thin workpieces when they are suctioned, but porous chucks can hold thin workpieces without deformation because they suction the entire surface.

■Strengths of porous chuckManufacturing that combines traditional techniques and innovative ideas.

Using reliable technology at our own factory, which we have cultivated for over 60 years since our founding, we perform high-precision processing to the micron order and manufacture each item to the drawings and shapes requested by our customers. Even if you do not have a drawing, please contact us and we can create a drawing for you.

■Made to order to meet expectations1. Choose porous: material, pore size, color
2. Choose a body: material, surface treatment
3． Design shapes: shapes

Model
There are 1 models for this product.

Product
Surface emitting porous chuck

Handling Company
Yoshioka Seiko Co., Ltd.

Categories

Clamps & Fasteners

Porous Chucks

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1 Models of Surface emitting porous chuck

Image	Part Number	Price (excluding tax)	Selectable pore diameter	Amount of light	Porous material	Body material	Size
	Surface emitting porous chuck	Available upon quote	120μm	~ 100,000 lux (measured on porous surface)	Alumina ceramic (white only)	SUS	~ φ200 □200

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About Company Handling This Product

Yoshioka Seiko Co., Ltd.

Japan

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Surface emitting porous chuck Yoshioka Seiko Co., Ltd.

About This Product

■Summary

■What is porous chuck?

■What is porous?

■Structure of porous chuck

■Differences from conventional hole adsorption

■Strengths of porous chuck

■Made to order to meet expectations

1 Models of Surface emitting porous chuck