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  3. Porous Chucks
  4. HoVaC (Hot Vacuum Chuck) (Yoshioka Seiko Co., Ltd.)
HoVaC (Hot Vacuum Chuck)-HoVaC (Hot Vacuum Chuck)
HoVaC (Hot Vacuum Chuck)-Yoshioka Seiko Co., Ltd.

HoVaC (Hot Vacuum Chuck)
Yoshioka Seiko Co., Ltd.

About This Product

■Summary

Porous chuck with added heating function up to 250℃ by incorporating a heater. Adsorption and heating are possible at the same time. It has a laminated structure of plate-shaped parts, and is designed to minimize thermal deformation during heating.

■What is porous chuck?

This is a product that uses porous material and negative pressure from suction to suction and fix thin objects onto a flat surface with high precision. Many porous chucks are incorporated into various semiconductor manufacturing equipment and inspection equipment, including dicing saws. In addition to silicon wafers, in recent years it has been able to suction and fix all kinds of thin workpieces such as films, flexible printed circuit boards (FPC), and paper.

■What is porous?

Generally speaking, it refers to a material that has countless continuous fine pores, like a sponge. Our porous material is made by baking fine powder such as alumina or stainless steel with air permeability, and can be manufactured with roughness (pore diameter) depending on the application.

■Structure of porous chuck

A porous chuck consists of a porous material and a body into which the porous material is inserted. We listen to the customer's requests and uses and propose the optimal specifications for each material and shape.

■Differences from conventional hole adsorption

Vacuum chucks for drilling holes and grooves deform thin workpieces when they are suctioned, but porous chucks can hold thin workpieces without deformation because they suction the entire surface.

■Strengths of porous chuck

Manufacturing that combines traditional techniques and innovative ideas. Using reliable technology at our own factory, which we have cultivated for over 60 years since our founding, we perform high-precision processing to the micron order and manufacture each item to the drawings and shapes requested by our customers. Even if you do not have a drawing, please contact us and we can create a drawing for you.

■Made to order to meet expectations

1. Choose porous: material, pore size, color 2. Choose a body: material, surface treatment 3． Design shapes: shapes

  • Product

    HoVaC (Hot Vacuum Chuck)

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1 Models of HoVaC (Hot Vacuum Chuck)

Image Part Number Price (excluding tax) Selectable pore diameter Temperature distribution Remarks Porous material Body material Size
HoVaC (Hot Vacuum Chuck)-Part Number-HoVaC (Hot Vacuum Chuck)

HoVaC (Hot Vacuum Chuck)

Available upon quote

2μm~230μm

±2℃ (depending on specifications)

Customization of heater types and wiring patterns available

Alumina ceramic or SiC

SUS (~100℃), alumina ceramic (~250℃)

Φ100~φ400, □100~□400

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About Company Handling This Product

Yoshioka Seiko Co., Ltd.

  • Japan

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Porous Chucks
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