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  3. Porous Chucks
  4. SiC porous chuck (Yoshioka Seiko Co., Ltd.)
SiC porous chuck-SiC porous chuck
SiC porous chuck-Yoshioka Seiko Co., Ltd.

SiC porous chuck
Yoshioka Seiko Co., Ltd.

About This Product

■Summary

Uses porous material (volume resistivity: approx. 10^7Ω・cm) that can remove static electricity. Porous chuck ideal for static electricity prevention.

■What is porous chuck?

This is a product that uses porous material and negative pressure from suction to suction and fix thin objects onto a flat surface with high precision. Many porous chucks are incorporated into various semiconductor manufacturing equipment and inspection equipment, including dicing saws. In addition to silicon wafers, in recent years it has been able to suction and fix all kinds of thin workpieces such as films, flexible printed circuit boards (FPC), and paper.

■What is porous?

Generally speaking, it refers to a material that has countless continuous fine pores, like a sponge. Our porous material is made by baking fine powder such as alumina or stainless steel with air permeability, and can be manufactured with roughness (pore diameter) depending on the application.

■Structure of porous chuck

A porous chuck consists of a porous material and a body into which the porous material is inserted. We listen to the customer's requests and uses and propose the optimal specifications for each material and shape.

■Differences from conventional hole adsorption

Vacuum chucks for drilling holes and grooves deform thin workpieces when they are suctioned, but porous chucks can hold thin workpieces without deformation because they suction the entire surface.

■Strengths of porous chuck

Manufacturing that combines traditional techniques and innovative ideas. Using reliable technology at our own factory, which we have cultivated for over 60 years since our founding, we perform high-precision processing to the micron order and manufacture each item to the drawings and shapes requested by our customers. Even if you do not have a drawing, please contact us and we can create a drawing for you.

■Made to order to meet expectations

1. Choose porous: material, pore size, color 2. Choose a body: material, surface treatment 3． Design shapes: shapes

  • Product

    SiC porous chuck

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1 Models of SiC porous chuck

Image Part Number Price (excluding tax) Selectable pore diameter Remarks Porous material
SiC porous chuck-Part Number-SiC porous chuck

SiC porous chuck

Available upon quote

10~230μm

Antistatic material, scratch resistant and ideal for laser processing

SiC (silicon carbide)

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About Company Handling This Product

Yoshioka Seiko Co., Ltd.

  • Japan

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Porous Chucks
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