Product Image | Part Number | Price (excluding tax) | Average supply current | Interface | Mass flow Full scale flow rate | Mass flow Maximum working pressure | Mass flow accuracy | Mass flow calibration | Mass flow fluid connector port | Maximum supply current | Size (LxWxH) | Supply voltage |
---|---|---|---|---|---|---|---|---|---|---|---|---|
SFM5460 |
Available upon quote | 50,000uA | RS485 |
0.05, 0.1, 0.2, 0.5, 1, 2, 5 and 10slm 20 and 50 and 100 sccm |
5bar | 0.08%FS or 8%SP | Air, O2, N2, Ar, CO2, He, H2, CH4 and N2Oflow | Legris | 320,000uA | 101.1 x 24.4 x 91mm3 | 14-26V |