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  2. Purification Equipment
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  4. Wet type abatement device Microbubble scrubber Panacea series (Toset Co., Ltd.)
Wet type abatement device Microbubble scrubber Panacea series-Panacea series
Wet type abatement device Microbubble scrubber Panacea series-Toset Co., Ltd.

Wet type abatement device Microbubble scrubber Panacea series
Toset Co., Ltd.

💻 Electronics & Electrical Use

About This Product

This is a compact and highly efficient wet abatement device that uses microbubbles. This is a microbubble scrubber for customers who want to remove Cl2 using only water. ・More than 99.7% of halogen gases such as Cl2 and F2 exhausted from dry etching equipment can be removed with just water. ・Removes over 99% of by-products and powder (2.5μm) generated by metal equipment. ・Since it is possible to eliminate harmful substances using recycled water within the factory without using chemicals, it is possible to significantly reduce running costs. ・We provide equipment that can handle small flow rates (30slm) to large flow rates (4,000slm) to suit customers' different manufacturing processes. ・We have specialized types for gas abatement and powder removal to meet customer needs. - By introducing Panacea, it is possible to reduce downtime of production equipment and improve the maintenance cycle of combustion abatement equipment.

  • Product

    Wet type abatement device Microbubble scrubber Panacea series

  • Usage Scenarios

    Electronics & Electrical Use

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1 Models of Wet type abatement device Microbubble scrubber Panacea series

Image Part Number Price (excluding tax) Target device Target gas Gas flow rate
Wet type abatement device Microbubble scrubber Panacea series-Part Number-Panacea series

Panacea series

Available upon quote

Dry etching, CVD, epitaxial growth

Cl2, HF, HCl, CVD combustion exhaust gas, powder (by-product)

Maximum: ~4000L/min

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Toset Co., Ltd.

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