Mercury prober CV/IV measurement system CVmap series
Yuzan Co., Ltd.
About This Product
This is a CV/IV measurement system using a mercury probe method with excellent reproducibility and safety.
■Features
Various types of wafer properties can be measured including Si, compound, SOI, SiC, and bulk wafers. Users can specify up to 49 measurement sites and can perform mapping measurements of C-V, I-V characteristics, TDDB, Vbd, Qbd oxide film breakdown evaluation, Dit, doping concentration, oxide film thickness, Low-k, High-k, etc. It is a total system.
■Main measurement items
・Doping profile (carrier concentration)
・Relative permittivity (Low-K, High-K, etc.)
・Flat band voltage
・Interfacial trap, fixed charge density
・Leak current
・Breakdown voltage measurement (Vbd, TDDB)
・Destructive test by charging (Qbd)
・Pinhole density, edge film thickness, insulation film capacitance
・Ferroelectric properties
・Generation lifetime insulation film resistance
・Pseudo-MOS transistor measurement (B-type)
・BOX interface Dit, mobility measurement (B-type)
■CVmap series lineup
・CVmap92A: Supports mapping measurement, standard type
・CVmap92B: SOI wafer compatible type
・CVmap3092A, B: 12 inch compatible type
・CV92M: Manual measurement type
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Product
Mercury prober CV/IV measurement system CVmap series
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Handling Company
Yuzan Co., Ltd.
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Categories
6 Models of Mercury prober CV/IV measurement system CVmap series
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Type |
|---|---|---|---|
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CVmap3092A |
Available upon quote | 12 inch compatible type |
CVmap3092B |
Available upon quote | 12 inch compatible type | |
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CVmap3093AC |
Available upon quote | - |
CVmap92A |
Available upon quote | Supports mapping measurement, standard type | |
CVmap92B |
Available upon quote | SOI wafer compatible type | |
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CV92M |
Available upon quote | Manual measurement type |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan