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Vacuum angle valve VLP seriesHandling Company
Sanko Ematech Co., Ltd.Categories
Click on the part number for more information about each product
| Image | Part Number | Price (excluding tax) | Drive method | Open/close sensor installation | Driving position | Shaft seal method VLP-SA | Allowable reverse differential pressure | Allowable baking temperature | Vacuum side main parts material | Vacuum level | Environmental atmosphere | Environmental temperature ℃ | Oils and fats (vacuum side) | Shape | Maximum allowable differential pressure when valve is open Reverse pressure MPa | Maximum allowable differential pressure when valve is open Positive pressure MPa | Valve plate allowable maximum differential pressure Reverse pressure MPa | Valve plate allowable maximum differential pressure Positive pressure MPa | Valve plate seal method | Atmospheric side main parts material | Hanging tool attachment part | Heating and cooling rate ℃/h | Guaranteed number of operations | Fluid temperature ℃ | Fluid used | Working pressure range Pa (abs) | Working pressure range | Leakage amount (external/internal) Pa・m3/s | Manufacturer | Body material | Baking allowable temperature ℃ Body | Seal parts material (vacuum side) | Cylinder supply air pressure MPaG | RoHS/SEC/EAR | Drive part | Years of warranty | Bellows material |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
|
VLP-SA |
Available upon quote |
Double acting |
Options (sold separately) |
Freedom |
O-ring |
0.10 MPa |
150℃ |
Stainless steel (304) |
Atmospheric pressure to 10^-5 Pa (abs) |
Non-corrosive atmosphere, non-condensing |
5~70 (Sensor: 5~60) |
VLP-SA, VLP-MB: Fluorine grease VLP-SB: Non-grease |
Angle |
0.1 |
0.1 |
0.1 |
0.1 |
O-ring |
Stainless steel (304), aluminum (6061) + anodized |
Nothing |
≦30 |
10,000 (VLP-SB) |
5~70 |
Non-corrosive fluid |
Atmospheric pressure ~1.0E-5 |
Atmospheric pressure to 10^-5 Pa (abs) |
≦1.0E-10 |
ULVAC Co., Ltd. |
Stainless steel (304) |
150 |
VLP-SA, VLP-SB : FKM VLP-MB: External seal: Metal, Internal seal: FKM |
0.40~0.60 |
Compatible/Not applicable/Not applicable |
70 (sensor: 60) |
1 year after delivery |
VLP-SB, VLP-MB: Stainless steel (316L) |
|
|
VLP-SB |
Available upon quote |
Double acting |
Options (sold separately) |
Freedom |
Bellows |
0.10 MPa |
150℃ |
Stainless steel (304) |
Atmospheric pressure to 10^-6 Pa (abs) |
Non-corrosive atmosphere, non-condensing |
5~70 (Sensor: 5~60) |
VLP-SA, VLP-MB: Fluorine grease VLP-SB: Non-grease |
Angle |
0.1 |
0.1 |
0.1 |
0.1 |
O-ring |
Stainless steel (304), aluminum (6061) + anodized |
Nothing |
≦30 |
10,000 (VLP-SB) , 100,000 (VLP-SB, VLP-MB) |
5~70 |
Non-corrosive fluid |
Atmospheric pressure ~1.0E-6 |
Atmospheric pressure to 10^-6 Pa (abs) |
≦1.0E-10 |
ULVAC Co., Ltd. |
Stainless steel (304) |
150 |
VLP-SA, VLP-SB : FKM VLP-MB: External seal: Metal, Internal seal: FKM |
0.40~0.60 |
Compatible/Not applicable/Not applicable |
70 (sensor: 60) |
1 year after delivery |
VLP-SB, VLP-MB: Stainless steel (316L) |
|
|
VLP-MB |
Available upon quote |
Double acting |
Options (sold separately) |
Freedom |
Bellows |
0.10 MPa |
150℃ (some 200℃) |
Stainless steel (304) |
Atmospheric pressure to 10^-8 Pa (abs) |
Non-corrosive atmosphere, non-condensing |
5~70 (Sensor: 5~60) |
VLP-SA, VLP-MB: Fluorine grease |
Angle |
0.1 |
0.1 |
0.1 |
0.1 |
O-ring |
Stainless steel (304), aluminum (6061) + anodized |
Nothing |
≦30 |
100,000 (VLP-SB, VLP-MB) |
5~70 |
Non-corrosive fluid |
Atmospheric pressure ~1.0E-8 |
Atmospheric pressure to 10^-8 Pa (abs) |
≦1.0E-10 |
ULVAC Co., Ltd. |
Stainless steel (304) |
150 |
VLP-SA, VLP-SB : FKM VLP-MB: External seal: Metal, Internal seal: FKM |
0.40~0.60 |
Compatible/Not applicable/Not applicable |
70 (sensor: 60) |
1 year after delivery |
VLP-SB, VLP-MB: Stainless steel (316L) |
|
|
VLP-U |
Available upon quote |
Double acting |
Options (sold separately) |
Vertical |
O-ring |
Not possible |
60℃ |
Carbon steel (400) Ni plated |
Atmospheric pressure to 10^-5 Pa (abs) |
Non-corrosive atmosphere, non-condensing |
5~40 |
High purity refined paraffin oil |
Angle |
Not available |
0.1 |
Not available |
0.1 |
O-ring |
Carbon steel (400) Ni plating + acrylic paint |
Nothing |
≦ 30 |
100,000 |
5~40 |
Non-corrosive fluid |
Atmospheric pressure ~1.0E-5 |
Atmospheric pressure to 10^-5 Pa (abs) |
≦ 1.3E-7 |
ULVAC Co., Ltd. |
Carbon steel (400) +Ni plating |
60 |
Nitrile rubber |
0.45~0.55 |
Compatible/Not applicable/Not applicable |
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