Vacuum deposition equipment for lift-off, thick film, and low-temperature film formation SEC-22C
Sanko Ematech Co., Ltd.
About This Product
■Product description
An electron beam type evaporation source is used as the evaporation source, and it is possible to form films of high melting point metals and oxides. Evaporation rate and film thickness are controlled using a crystal oscillation type film thickness meter. The main pump is equipped with a cryopump. The operation control system is fully automatic.
■Features
The evaporation source and substrate jig are arranged to obtain good film thickness distribution. The electron beam evaporation source uses a 6-point crucible, so it is possible to form 6 types of films in the same vacuum. It can store 30 boards with a diameter of 75 mm, 20 boards with a diameter of 100 mm, and 9 boards with a diameter of 150 mm. Film formation is possible within an incident angle of ±5°. The anti-fouling shield inside the vacuum chamber is separated, so it can be easily replaced.
A board cleaning mechanism and speed trap are available as options.
■Main uses
・Electrode film/protective film
・Lift-off film formation
・Thick film deposition
・Low temperature film formation
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Product
Vacuum deposition equipment for lift-off, thick film, and low-temperature film formation SEC-22C
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Handling Company
Sanko Ematech Co., Ltd.
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Categories
1 Models of Vacuum deposition equipment for lift-off, thick film, and low-temperature film formation SEC-22C
| Product Image | Part Number | Price (excluding tax) | Arrival pressure | Compressed air | Electric power evaporation source | Evaporation source | Exhaust system | Film thickness distribution | Footprint | Gas pressure | Manufacturer | Power main unit | Pumping speed | Substrate heating | Vacuum chamber size | Water amount |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
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SEC-22C |
Available upon quote | 6.7×10-5Pa or less | 0.7MPa (set pressure 0.5MPa), connection diameter Rc1/2 | Φ3 200V Approx. 25KVA (73A) | Electron gun 270° deflection, power 16kW | Cryopump, dry pump, mechanical booster pump | Within ±1% (within batch, between batches) T/S=900mm | W3,700mm×D4,300mm×H2,400mm | 0.05MPa (set pressure 0.02MPa), connection diameter SWL1/4 | Showa Vacuum Co., Ltd. | Φ3 200V Approx. 40KVA (115A) | From atmospheric pressure to 4.0×10-4Pa within 20 minutes | MAX150℃ Regular use 100℃ | W800mm×D800mm×H1,300mm, made of SUS304 | 0.2MPa or more (differential pressure), 44L/min, 20~25℃ |
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About Company Handling This Product
- Japan